High resolution powder blast micromachining

Wensink, H.; Berenschot, Johan W.; Jansen, Henricus V.; Elwenspoek, M.

doi:10.1109/memsys.2000.838615

Cited by 85 publications

(58 citation statements)

References 11 publications

(4 reference statements)

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“…Thus, various non-conventional machining techniques have been applied to the micro-machining of glass; however, the results show the difficulties encountered in the micro-machining of glass. Table 1 shows an overview of available current glass machining techniques and their general capabilities [3]. From Table 1, it can be shown that powder blasting using lithographic masking can be successfully applied to the micro-machining of glass to obtain a small-sized feature with a high aspect ratio.…”

Section: Introductionmentioning

confidence: 99%

Effects of the impact angle variations on the erosion rate of glass in powder blasting process

Park

Cho

Lee

2004

The International Journal of Advanced Manufacturing Technology

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Sandblasting, a conventional technique which is used for paint or scale removing, deburring, and glass decorating, has recently been developed into a powder blasting technique for brittle materials capable of producing micro-structures larger than 100 lm. This article describes an investigation of the effects of the impact angle of particles, the scanning times, and the standoff distance on the surface roughness, the weight-loss rate of samples with no mask, and the wall profile and overetching of samples with different mask patterns in powder blasting of soda-lime glass. The parameters are the various impact angles between 50 and 90°, the scanning times of a nozzle up to 40, and the standoff distances between 70 and 100 mm. The widths of the mask pattern are 0.2 mm, 0.5 mm, and 1 mm. The powder used is Al2O3 sharp particles, WA#600. The mass flow rate of powder during the erosion test is constant at 175 g/min and the blasting pressure of the powder is 0.2 Mpa. After a series of necessary experiments are performed, the results are investigated and analysed. As a result, a fundamental basis is established that can be applied to powder blasting to produce micro-mechanical parts of glass.

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Section: Introductionmentioning

confidence: 99%

Effects of the impact angle variations on the erosion rate of glass in powder blasting process

Park

Cho

Lee

2004

The International Journal of Advanced Manufacturing Technology

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“…As discussed in Section II we assume a G-MOT type geometry using a 10 mm diameter grating structure and a cavity volume of 15×15×3 mm 3 to avoid light scattering off sidewalls. Around 90% of the beam overlap volume is within 2.5 mm of the grating surface, and so this is a reasonable choice of height and is also feasible to fabricate from silicon using deep reactive ion etching, wet etching, machining, or powder blasting 250 . We have consciously avoided designing the MicroMOT around a single application or manipulation technique, e.g.…”

Section: Prototype Micromotmentioning

confidence: 99%

Contributed Review: The feasibility of a fully miniaturized magneto-optical trap for portable ultracold quantum technology

Rushton

Aldous

Himsworth

2014

Review of Scientific Instruments

103

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Experiments using laser cooled atoms and ions show real promise for practical applications in quantumenhanced metrology, timing, navigation, and sensing as well as exotic roles in quantum computing, networking and simulation. The heart of many of these experiments has been translated to microfabricated platforms known as atom chips whose construction readily lend themselves to integration with larger systems and future mass production. To truly make the jump from laboratory demonstrations to practical, rugged devices, the complex surrounding infrastructure (including vacuum systems, optics, and lasers) also needs to be miniaturized and integrated. In this paper we explore the feasibility of applying this approach to the Magneto-Optical Trap; incorporating the vacuum system, atom source and optical geometry into a permanently sealed microlitre system capable of maintaining 10 −10 mbar for more than 1000 days of operation with passive pumping alone. We demonstrate such an engineering challenge is achievable using recent advances in semiconductor microfabrication techniques and materials.PACS numbers: 07.07.Df, 37.10.Gh, 07.30.Kf, I. ULTRACOLD QUANTUM TECHNOLOGYSince the first demonstrations of atoms and ions at sub-millikelvin temperatures in the mid-1980s, the field of atomic physics has been revolutionized by laser cooling and trapping as it provides researchers with a method to probe some of the purest and sensitive quantum systems available. This field is still highly productive and recently has put significant emphasis on the practical applications of this technology beyond the laboratory 1,2 . It was evident very early on that ultracold matter would be an indispensable tool in precise timing applications and a recent demonstration 3 has shown extremely low instabilities at the 10 −18 level. The wavelike nature of atoms as they are cooled to lower temperatures can be used to form atomic interferometers that outperform optical counterparts in measurements of accelerated reference frames 4-7 , which are important for inertial guidance systems, but can also provide sensitive measurements of mass, charge and magnetic fields [8][9][10][11] . Greater sensitivity beyond the classical limit is possible via squeezed 12 and entangled states 13-15 , which are also fundamental attributes for quantum computing 16,17 , and long distance quantum networking 18 . Ultracold matter has been used in the emerging field of quantum simulation 19 and is an indispensable tool in determining fundamental constants 20 , testing general relativity 21 and defining measurement standards 22 . Many researchers and industries believe such tools will be a major part of the 'second quantum revolution' in which the more 'exotic' properties of quantum physics are applied for practical applications 23,24 .The field of ultracold matter has reached a matua) m.d.himsworth@soton.ac.uk rity in both experimental methods and theoretical understanding allowing experiments to begin leaving the laboratory 25-27 . These systems are bespoke, rarely take up a ...

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“…Through-holes are defined using powderblasting [39]- [41]. The Pyrex and silicon wafers are fusion-bonded and annealed at 425 .…”

Section: B Fabricationmentioning

confidence: 99%

A differential viscosity detector for use in miniaturized chemical separation systems

Blom

Chmela

Heyden

et al. 2005

J. Microelectromech. Syst.

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Abstract-In this paper, we present a micromachined differential viscosity detector suitable for integration into an on-chip hydrodynamic chromatography system. The general design, however, is applicable to any liquid chromatography system that is used for separation of polymers. The micromachined part of the detector consists of a fluidic Wheatstone bridge and a low hydraulic capacitance pressure sensor of which the pressure sensing is based on optical detection of a membrane deflection. The stand-alone sensor shows a resolution in specific viscosity of 3 10 3 , in which specific viscosity is defined as the increase in viscosity by a sample, relative to the baseline viscosity of a solvent.[0947]

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High resolution powder blast micromachining

Cited by 85 publications

References 11 publications

Effects of the impact angle variations on the erosion rate of glass in powder blasting process

Effects of the impact angle variations on the erosion rate of glass in powder blasting process

Contributed Review: The feasibility of a fully miniaturized magneto-optical trap for portable ultracold quantum technology

A differential viscosity detector for use in miniaturized chemical separation systems

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