Raman Spectroscopy of ZnO Thin Films by Atomic Layer Deposition

Tapily, Kandabara; Gu, Dongdong; Baumgart, Helmut; Rigo, Maria Veronica; Seo, Jaetae

doi:10.1149/1.3485248

Cited by 10 publications

(4 citation statements)

References 20 publications

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“…Due to the frequent occurrence of E2 modes in standard backscattering experiments, they are con- one. In accordance with [15,16], the observed blue shifts of the E2(high) Raman peaks cate the presence of compressive internal stresses in zinc oxide films. In addition, i CF/ZnO_ns sample prepared without a ZnO seed layer and consisting of an array o terconnected ZnO nanosheets, the intensity of the E2(high) peak is lower.…”

Section: Resultssupporting

confidence: 79%

“…According to [18,25], the small shifts in optical phonon energy towards the high wavenumbers observed for the CF/ZnO_nr and CF/ZnO_ns samples may indicate that nanostructured films deposited using SILAR have a bulk phonon structure rather than a nanoparticle one. In accordance with [15,16], the observed blue shifts of the E 2(high) Raman peaks indicate the presence of compressive internal stresses in zinc oxide films. In addition, in the CF/ZnO_ns sample prepared without a ZnO seed layer and consisting of an array of interconnected ZnO nanosheets, the intensity of the E 2(high) peak is lower.…”

Section: Resultssupporting

confidence: 77%

“…Raman spectroscopy has been used for qualitative and quantitative studies of electronphonon interaction in nanostructured ZnO films in CF/ZnO_nr and CF/ZnO_ns samples because it is sensitive to lattice distortions, crystal defects, and phase transformations [13,[15][16][17][18][19][20]. The vibrational phonon modes of the nanostructured ZnO layers were characterized using a Raman microscope (Thermofisher Nicolet DXR Microscope, Thermo Fisher Scientific Inc., Waltham, MA, USA) with a solid-state diode green laser with an excitation wavelength of 532 nm and a power of 10 mW.…”

Section: Methodsmentioning

confidence: 99%

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Triboelectric Nanogenerators Based on Nanostructured Layers of Zinc Oxide Deposited on Carbon Fabric

Petrushenko,

Fijalkowski,

Kopach

et al. 2023

J. Compos. Sci.

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In this work, to obtain textile triboelectric layers for wearable flexible triboelectric nanogenerators (TENGs), we used two modes of growing nanostructured zinc oxide (ZnO) arrays on a carbon fabric (CF) using the automatic Successive Ionic Layer Adsorption and Reaction (SILAR) method. To produce a CF/ZnO_nr triboelectric textile with an array of intergrown short ZnO nanorods, we used a pre-coating of carbon fibers with ZnO seed layers. When the ZnO layer was fabricated by automatic SILAR on bare carbon fabric, we obtained the CF/ZnO_ns textile with an array of interconnected ZnO nanosheets 50–100 nm thick. As a proof of concept, we developed and tested two prototypes of flexible vertical contact–separation mode CF/ZnO_nr/PET/ITO and CF/ZnO_ns/PET/ITO TENGs, in which a gap was involuntarily formed between the smooth PET layer and the woven carbon textile coated with nanostructured ZnO films. In pressing tests with a force of ~5 N (pressure ~33 kPa), the CF/ZnO_ns/PET/ITO TENG created a higher open-circuit voltage up to 30 V and a higher maximum surface charge density of 1.3 μC/m2. In the successive press–release tests, this TENG showed an output voltage of 3.6 V, a current density of 1.47 μA/cm2, and a power density of 1.8 µW/cm2, confirming its effectiveness.

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Section: Resultssupporting

confidence: 79%

Section: Resultssupporting

confidence: 77%

Section: Methodsmentioning

confidence: 99%

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Triboelectric Nanogenerators Based on Nanostructured Layers of Zinc Oxide Deposited on Carbon Fabric

Petrushenko,

Fijalkowski,

Kopach

et al. 2023

J. Compos. Sci.

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“…Our measurements for the sample with 20 cycles show peaks at 448, 490, 610, and 815 cm −1 , which are roughly the version of the cubic-phase peaks blue-shifted by 200 cm −1 while the 30-cycle sample results in peaks blue-shifted by around 160 cm −1 . This shift is explained by a compressive stress in the material [29]. This is expected since, with 20 cycles, the islands are still isolated, spaced and have still not coalesced, as shown in the TEM images.…”

Section: Structural and Optical Characterization Of The Nanoislandsmentioning

confidence: 71%

Cubic-phase zirconia nano-island growth using atomic layer deposition and application in low-power charge-trapping nonvolatile-memory devices

El‐Atab¹,

Ghobadi

et al. 2017

Nanotechnology

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The manipulation of matter at the nanoscale enables the generation of properties in a material that would otherwise be challenging or impossible to realize in the bulk state. Here, we demonstrate growth of zirconia nano-islands using atomic layer deposition on different substrate terminations. Transmission electron microscopy and Raman measurements indicate that the nano-islands consist of nano-crystallites of the cubic-crystalline phase, which results in a higher dielectric constant (κ ∼ 35) than the amorphous phase case (κ ∼ 20). X-ray photoelectron spectroscopy measurements show that a deep quantum well is formed in the AlO/ZrO/AlO system, which is substantially different to that in the bulk state of zirconia and is more favorable for memory application. Finally, a memory device with a ZrO nano-island charge-trapping layer is fabricated, and a wide memory window of 4.5 V is obtained at a low programming voltage of 5 V due to the large dielectric constant of the islands in addition to excellent endurance and retention characteristics.

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Carbon fabric coated with nanostructured zinc oxide layers for use in triboelectric self-powered touch sensors

Petrushenko,

Fijalkowski,

Kopach

et al. 2024

J Mater Sci: Mater Electron

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An environmentally friendly, low-cost, and lightweight biocompatible textile triboelectric material was made by in situ coating carbon fabric (CF) with nanostructured zinc oxide (ZnO) layers using the automatic Successive Ionic Layer Adsorption and Reaction (SILAR) method. Depending on the deposition mode, we created triboelectric CF/ZnO textiles with multidirectionally intergrown short ZnO nanorods or with arrays of ZnO nanosheets. The Raman spectra confirmed the hexagonal wurtzite structure of both types of ZnO layers and the unique a-axis texture of the nanosheets. In the developed triboelectric CF/ZnO/PET/ITO sensors, the upper tribonegative part was made of a polyethylene terephthalate film coated with a thin layer of indium-tin oxide, and the lower tribopositive part was made of CF/ZnO textile. In tests with repeated hand tapping at low frequency 1.3–13 Hz and a force of ∼ 5 N (pressure of ∼ 33 kPa), the open-circuit voltage pulses were ∼ 15 V for short ZnO nanorods and ∼ 30 V for ZnO nanosheets, their duration did not exceed a few milliseconds. Due to the nanosheet morphology of the ZnO layer, the maximum touch-induced surface charge density for the corresponding triboelectric textile (0.7 µC/m2) was almost twice than for the CF/ZnO textile with intergrown ZnO short nanorods (0.4 µC/m2). The touch sensor with ZnO nanosheets showed an output voltage of 3.6 V, a current density of 1.47 µA/cm2, and a power density of 1.8 µW/cm2. It can be used as a dual-mode sensor due to ability to recognize the hardness of objects by analyzing the output current peaks.

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Raman Spectroscopy of ZnO Thin Films by Atomic Layer Deposition

Cited by 10 publications

References 20 publications

Triboelectric Nanogenerators Based on Nanostructured Layers of Zinc Oxide Deposited on Carbon Fabric

Triboelectric Nanogenerators Based on Nanostructured Layers of Zinc Oxide Deposited on Carbon Fabric

Cubic-phase zirconia nano-island growth using atomic layer deposition and application in low-power charge-trapping nonvolatile-memory devices

Carbon fabric coated with nanostructured zinc oxide layers for use in triboelectric self-powered touch sensors

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