1989
DOI: 10.1143/jjap.28.468
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Quick Deposition of ZuS:Mn Electroluminescent Thin Films by Intense, Pulsed, Ion Beam Evaporation

Abstract: Electroluminescent ZnS:Mn thin films have been guickly deposited by a high-density, high-temperature plasma produced by the irradiation of an intense (>GW/cm2), pulsed (∼tens of ns) ion beam onto a ZnS:Mn target. The films prepared on a glass substrate have a polycrystalline hexagonal structure. The temperature of the target plasma was estimated to be ∼2.7 eV, where the plasma was highly ionized. The instantaneous deposition rate was estimated to be ∼4 cm/s, which is at least five orders of magnitude higher… Show more

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Cited by 37 publications
(3 citation statements)
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“…We employed pulsed laser deposition (PLD) and ion-beam evaporation (IBE) [17,18] techniques to obtain SrB 6 and B 13 C 2 films, respectively. We employed pulsed laser deposition (PLD) and ion-beam evaporation (IBE) [17,18] techniques to obtain SrB 6 and B 13 C 2 films, respectively.…”
Section: Methodsmentioning
confidence: 99%
“…We employed pulsed laser deposition (PLD) and ion-beam evaporation (IBE) [17,18] techniques to obtain SrB 6 and B 13 C 2 films, respectively. We employed pulsed laser deposition (PLD) and ion-beam evaporation (IBE) [17,18] techniques to obtain SrB 6 and B 13 C 2 films, respectively.…”
Section: Methodsmentioning
confidence: 99%
“…[6][7][8][9][10][11][12] The solid target is irradiated by an intense pulsed light ion beam (LIB), 11,13,14) to produce high-temperature, high-density ablation plasma. The plume is deposited on the substrate.…”
Section: Introductionmentioning
confidence: 99%
“…This method has been termed pulsed ion-beam evaporation (IBE). [1][2][3][4][5][6][7] Various thin films including B 12þx C 3Àx , 4,5) SrAl 2 O 4 : Eu 6) and TiFe 7) have been successfully prepared by IBE.…”
Section: Introductionmentioning
confidence: 99%