“…The p-n heterojunction would thus include the advantages of a higher built-in potential (lower gate leakage current), a higher mobility channel, carrier confinement, and no Fermi-level pinning at 0741-3106/90/0100-0030$01 .OO 0 1990 IEEE the junction. Since light-hole conduction is favored along the channel direction in compressively strained InGaAs [3], realization of even lower power complementary logic circuits is possible with this structure. Furthermore, the precise control of epilayer thickness, doping level, and alloy composition of the MBE technique is advantageous over direct ion implantation into liquid-encapsulated-Czochralski (LEC) semi-insulating (SI) GaAs substrates, where device performance has been shown to be critically dependent on substrate quality (see, for example, [lo]).…”