1979
DOI: 10.1149/1.2129281
|View full text |Cite
|
Sign up to set email alerts
|

Quantitative Chemical Depth Profiles of Anodic Oxide on GaAs Obtained by X‐Ray Photoelectron Spectroscopy

Abstract: The composition and structure of anodic oxides about 400Å thick grown in either 3% tartaric acid/propylene glycol or K2Cr2O7/HOCH2·CH2OH electrolytes are investigated. The ion sputtering effects are taken into account to obtain quantitative chemical depth profiles. The K2Cr2O7‐normalgrown oxide is inhomogeneous with an average Ga3+/(oxidized As) ratio of ∼3 and ∼1 in the surface region and the bulk of this oxide, respectively, while the tartaric acid‐grown oxide is homogeneous with a Ga3+/As3+ ratio of ∼1 … Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1

Citation Types

0
7
0

Year Published

1979
1979
2015
2015

Publication Types

Select...
9
1

Relationship

1
9

Authors

Journals

citations
Cited by 34 publications
(7 citation statements)
references
References 10 publications
0
7
0
Order By: Relevance
“…No literature for the binding energies of arsenic onto CuO could be found. However, several studies have reported the As3d peak of As(V) occurring in this range of binding energies such as; As(V) on synthetic birnessite located at a binding energy of 45.15 eV 35 , at a binding energy of 45.28 eV for arsenopyrite 36 , as well as As(V) peaks at binding energies of 45.7 through 45.9 eV reported by several other researchers 27 37 38 39 40 . For the As3d peak, As(III) binding energies can generally be located at approximately 1 eV lower than the binding energies of As(V) at a range of approximately 44.7 to 45.0 eV 12 41 .…”
Section: Resultsmentioning
confidence: 92%
“…No literature for the binding energies of arsenic onto CuO could be found. However, several studies have reported the As3d peak of As(V) occurring in this range of binding energies such as; As(V) on synthetic birnessite located at a binding energy of 45.15 eV 35 , at a binding energy of 45.28 eV for arsenopyrite 36 , as well as As(V) peaks at binding energies of 45.7 through 45.9 eV reported by several other researchers 27 37 38 39 40 . For the As3d peak, As(III) binding energies can generally be located at approximately 1 eV lower than the binding energies of As(V) at a range of approximately 44.7 to 45.0 eV 12 41 .…”
Section: Resultsmentioning
confidence: 92%
“…Because of the small mass difference between Ga and As, bacl~cattering spectroscopy cannot be used to measure compositmn profiles. However the bulk stoichiometry, that is, the Ga plus As concentration relative to the oxygen atom concentration is easily measured from the backscattered yields using the relation (24) No (25) and also Ishii and Jeppson (26) who used an electrolyte similar to ours. The bulk Ga to As ratio in anodic oxides has been measured using Auger spectroscopy (4,6).…”
Section: Resultsmentioning
confidence: 99%
“…In contrast, investigations of film composition have revealed a less unified picture, with examples of relatively uniform films with atomic ratios of Ga to As > 1 [6,7], < 1 [8] and about unity [9], layered films [10] and interfacial enrichments [11][12][13]. The films are generally recognized to consist of Ga 2 O 3 and As 2 O 3 [14], although their precise distributions within the overall oxide are unclear and other species have been reported including As 2 O 5 [15,16]. Furthermore, it is reasonably well established that As 2 O 3 is readily lost from the outer 20 nm or so of the film thickness if films are rinsed in water [17].…”
Section: Introductionmentioning
confidence: 99%