2010
DOI: 10.1143/jjap.49.07hd11
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Quantitative Analysis of Power Leakage in an Film Bulk Acoustic Resonator Device at the Antiresonance Frequency

Abstract: In this paper we analyze for the first time quantitatively the acoustic losses in a film bulk acoustic wave resonator (FBAR), which are expected to deteriorate the device performance. To this end, we regard the effective acoustic admittance, conduct laser probing measurements and finite element modeling (FEM). For our device under test (DUT) at the anti-resonance frequency, we compare the relative power of observable modes in the active and passive area and point out the relevant energy loss mechanism in terms… Show more

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Cited by 15 publications
(8 citation statements)
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“…Elastic constants and sound velocities of thin films are essential parameters of surface acoustic wave (SAW) filters, [1][2][3][4] film bulk acoustic resonators (FBAR), [5][6][7] and acoustic mirrors 8,9) for wireless communication. Next-generation communication uses much higher frequency band-pass filters, 10,11) which are composed of much thinner films.…”
Section: Introductionmentioning
confidence: 99%
“…Elastic constants and sound velocities of thin films are essential parameters of surface acoustic wave (SAW) filters, [1][2][3][4] film bulk acoustic resonators (FBAR), [5][6][7] and acoustic mirrors 8,9) for wireless communication. Next-generation communication uses much higher frequency band-pass filters, 10,11) which are composed of much thinner films.…”
Section: Introductionmentioning
confidence: 99%
“…As BAW resonator shows low vertical acoustic leakage due to air-gap structure or alternating acoustic mirror stacks implemented underneath the resonator, it performs lower losses and higher Q-factors than surface acoustic wave (SAW) resonators. Although BAW resonators utilize longitudinal acoustic waves, lateral acoustic waves are also generated in a large amount especially during anti-resonance [4,5,6,7]. Suppression of this lateral acoustic wave leakage is important for its antiresonance performances such as Q a and kt 2 .…”
Section: Introductionmentioning
confidence: 99%
“…This technique is highly promising for evaluating ultrasound attenuation in thin films, [5][6][7][8] which is an important parameter for designing ultrahigh-frequency ultrasonic-resonator devices such as bulk-acoustic-wave resonators. [9][10][11] The most reliable attenuation measurement can be made on a freestanding thin film because of no energy leakage to the substrate. The free-standing thin film is also suitable for sensor applications, including mass-sensitive biosensors.…”
mentioning
confidence: 99%