PZT-Driven Micromagnetic Optical Devices

Abstract

A magneto-optic spatial light modulator (MOSLM) driven by electric field is presented. Using finite element method simulation, the parameters of the MOSLM are decided including the 1 µm piezoelectric lead zirconate titanate (PZT)-based layer, the 200 nm bottom electrode, and the 8V electrical applied voltage. A flat surface magneto-optical bismuth-substituted iron garnet (Bi:YIG) based film having an array-pixels structure was created by a site-selected epitaxial method on a SGGG-based substrate. In order to avoid high temperature annealing process which may damage the Bi:YIG film, the PZT film was deposited by the aerosol deposition method (ADM) on the Bi:YIG film. By stress field induced by the PZT film to the Bi:YIG film with an external magnetic field, the pixels of the device were successfully switched.

Aerosol Deposition of Ceramic Thick Films at Room Temperature: Densification Mechanism of Ceramic Layers

“…AD 1–4 is a novel and very attractive coating method for ceramic integration. We have reported the application of the AD method to micro‐actuators, 5–7 embedded passive components for high‐frequency devices, 8–11 and high‐speed optical modulators 12,13 …”

Aerosol techniques for manufacturing piezoelectric materials

“…The novel MOSLM driven by an electric field instead of a magnetic field was first achieved using the 16 14.30 PZT-based magneto-optic spatial light modulators driven with PZT thick layer deposited on Bi-YIG single crystal structure by AD method [92].…”

Magnetophotonic crystals—a novel magneto-optic material with artificial periodic structures

“…Recent renewed interest in MOSLMs has resulted from the development of optical volumetric recording with holography, 51,52 in which a SLM is employed to modulate the amplitude and/or phase of light for generating the signal optical beam. For this purpose, two types of MOSLMs with LPE-grown magnetic garnet films have been developed; one is driven by current (digital MOSLM [53][54][55][56][57] ) while the other is driven by voltage (analog MOSLM 58,59 ) for controlling the direction of magnetization in a magneto-optic pixel. Also, selective-area epitaxy has been proposed.…”