Aerosol techniques for manufacturing piezoelectric materials

Akedo, Jun

doi:10.1533/9781845699758.2.493

Cited by 3 publications

(4 citation statements)

References 83 publications

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“…To evaluate the piezoelectric constant of PZT and PMN–PT, a beam with a specific shape and laminar structure was fabricated [ 43 ]. The piezoelectric constant is strongly related to the fabrication process and poling condition [ 28 , 31 ]. To obtain a reliable comparison between the PZT and PMN-PT films, both films were annealed at 600 °C and poled at the highest electric field that they could sustain owing to the difference in dielectric strength.…”

Section: Resultsmentioning

confidence: 99%

See 1 more Smart Citation

Comparison of Metal-Based PZT and PMN–PT Energy Harvesters Fabricated by Aerosol Deposition Method

Chen

Lin

Trstenjak

et al. 2021

Sensors

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In this study, polycrystalline lead magnesium niobate–lead titanate (PMN–PT) was explored as an alternative piezoelectric material, with a higher power density for energy harvesting (EH), and comprehensively compared to the widely used polycrystalline lead zirconate titanate (PZT). First, the size distribution and piezoelectric properties of PZT and PMN–PT raw powders and ceramics were compared. Thereafter, both materials were deposited on stainless-steel substrates as 10 μm thick films using the aerosol deposition method. The films were processed as {3–1}-mode cantilever-type EH devices using microelectromechanical systems. The films with different annealing temperatures were characterized by scanning electron microscopy, energy-dispersive X-ray spectroscopy, and dielectric behavior measurements. Furthermore, the mechanical and electrical properties of PMN–PT- and PZT-based devices were measured and compared. The PMN–PT-based devices showed a higher Young’s modulus and lower damping ratio. Owing to their higher figure of merit and lower piezoelectric voltage constant, they showed a higher power and lower voltage than the PZT-based devices. Finally, when poly-PMN–PT material was the active layer, the output power was enhanced by 26% at the 0.5 g acceleration level. Thus, these devices exhibited promising properties, meeting the high current and low voltage requirements in integrated circuit designs.

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Section: Resultsmentioning

confidence: 99%

“…Akedo and Lebedev reported that the piezoelectric constant d 31 of aerosol deposited PZT film increased from 20–30 to 130 pC/N by increasing the annealing temperature from 500 to 600 °C. They also indicated that the piezoelectric constant improved 10-fold after optimizing the poling electric field and poling temperature [ 27 , 28 ].…”

Section: Introductionmentioning

confidence: 99%

Comparison of Metal-Based PZT and PMN–PT Energy Harvesters Fabricated by Aerosol Deposition Method

Chen

Lin

Trstenjak

et al. 2021

Sensors

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“…Aerosol deposition (AD) is a technique for depositing thick ceramic films, better suitable than the sputtering techniques. Akedo et al developed the AD method, where submicron ceramic particles were accelerated by gas flow, then impacted on a substrate [49,50].…”

Section: Ad Preparation Methodsmentioning

confidence: 99%

Piezoelectric Actuators – Recent Innovations 2024 –

Uchino

2024

Preprint

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This article reviews recent innovations in piezoelectric actuators, then indicates the future research targets. In the materials, the piezoelectric performances of relaxor-lead titanate (PZN-PT, PMN-PT) single crystals have been improved significantly by an AC electric poling technique. Also new loss characterization techniques facilitate developing high-power density piezoelectrics. The RMS vibration velocity reaches 0.6 m/s in the k31 mode in lead zirconate titanate (PZT) nowadays, which corresponds to power density 30 W/cm3. Pb-free materials are urged due to the recent political regulation on toxic materials. In device designs, the original multilayer actuators (MLA) with Ag/Pd electrode have been switched to the ones with Cu or pure Ag, in order to suppress the heat generation, then to enhance the device power density. Piezoelectric micro-electro-mechanical-systems (MEMS’s) started to utilize the <1 0 0> oriented epitaxial films of rhombohedral PZT compositions, which exhibits enhanced piezoelectric properties. Also for higher-power applications, aero-sol deposition (AD) methods have been introduced to 10 -thick films. Regarding drive/control techniques in piezo-actuators, three developments are on-going, that is, “negative capacitance” power supplies for driving off-resonance (pseudo-DC) piezo-actuators, capacitive AC power supplies for efficiently driving resonance piezo-actuators, and DC/DC converters for harvesting electric energy from high-impedance piezoelectric devices under noise vibration. The applications of piezoelectric actuators in the 21st century seem to be oriented toward “politico-engineering” with four keywords, “cooperation, protection, reduction, and continuation”. The sustainability technologies include the following piezoelectric items: (a) Pb-free piezoelectrics, (b) ultrasonic technology for decomposing hazardous materials, (c) reduction of contamination gas, (d) piezoelectric energy harvesting, and (e) device improvement with high energy-efficiency. On the other hand, the following crisis technologies have been developed with piezoelectrics: (a) detection and neutralization technologies of infectious/epidemic diseases such as anthrax, (b) autonomous unmanned underwater, aerial, and land vehicles with piezoelectric actuators, (c) pin-point target weapons, (d) high voltage supplies with piezoelectric transformers, and (e) compact energy sources for remote actuating/sensing systems.

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“…SAWs are elastic waves propagating along the surface or interface of an elastic solid (Wu, 1983;Wu et al, 1983), which have different modes, including Rayleigh wave, Lamb wave, Bleustein-Gulyaev-Shimizu wave, leaky SAW, shear horizontal-SAW, Love wave, Stoneley wave, Sezawa wave, etc. (Akedo, 2010;Lu et al, 2021;Kiełczy nski, 2022;Kadota et al, 1996;Plessky and Thorvaldsson, 1995;Chen et al, 2022aChen et al, , 2022bDarinskii and Shuvalov, 2021;Hadj-Larbi and Serhane, 2019;Fu et al, 2022). The most common SAW mode used in physical SAW sensors is Rayleigh wave, which is the first discovered SAW and one of the classic SAW modes.…”

Section: State Of the Art In Surface Acoustic Wave Sensor Technologiesmentioning

confidence: 99%

A review of surface acoustic wave sensors: mechanisms, stability and future prospects

Tang,

Wu,

Yang

et al. 2024

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Purpose Surface acoustic wave (SAW) sensors have attracted great attention worldwide for a variety of applications in measuring physical, chemical and biological parameters. However, stability has been one of the key issues which have limited their effective commercial applications. To fully understand this challenge of operation stability, this paper aims to systematically review mechanisms, stability issues and future challenges of SAW sensors for various applications. Design/methodology/approach This review paper starts with different types of SAWs, advantages and disadvantages of different types of SAW sensors and then the stability issues of SAW sensors. Subsequently, recent efforts made by researchers for improving working stability of SAW sensors are reviewed. Finally, it discusses the existing challenges and future prospects of SAW sensors in the rapidly growing Internet of Things-enabled application market. Findings A large number of scientific articles related to SAW technologies were found, and a number of opportunities for future researchers were identified. Over the past 20 years, SAW-related research has gained a growing interest of researchers. SAW sensors have attracted more and more researchers worldwide over the years, but the research topics of SAW sensor stability only own an extremely poor percentage in the total researc topics of SAWs or SAW sensors. Originality/value Although SAW sensors have been attracting researchers worldwide for decades, researchers mainly focused on the new materials and design strategies for SAW sensors to achieve good sensitivity and selectivity, and little work can be found on the stability issues of SAW sensors, which are so important for SAW sensor industries and one of the key factors to be mature products. Therefore, this paper systematically reviewed the SAW sensors from their fundamental mechanisms to stability issues and indicated their future challenges for various applications.

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Aerosol techniques for manufacturing piezoelectric materials

Cited by 3 publications

References 83 publications

Comparison of Metal-Based PZT and PMN–PT Energy Harvesters Fabricated by Aerosol Deposition Method

Comparison of Metal-Based PZT and PMN–PT Energy Harvesters Fabricated by Aerosol Deposition Method

Piezoelectric Actuators – Recent Innovations 2024 –

A review of surface acoustic wave sensors: mechanisms, stability and future prospects

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