A magneto-optic spatial light modulator (MOSLM) driven by electric field is presented. Using finite element method simulation, the parameters of the MOSLM are decided including the 1 µm piezoelectric lead zirconate titanate (PZT)-based layer, the 200 nm bottom electrode, and the 8V electrical applied voltage. A flat surface magneto-optical bismuth-substituted iron garnet (Bi:YIG) based film having an array-pixels structure was created by a site-selected epitaxial method on a SGGG-based substrate. In order to avoid high temperature annealing process which may damage the Bi:YIG film, the PZT film was deposited by the aerosol deposition method (ADM) on the Bi:YIG film. By stress field induced by the PZT film to the Bi:YIG film with an external magnetic field, the pixels of the device were successfully switched.
Bismuth-substituted yttrium iron garnet (Bi:YIG, Bi0.5Y2.5Fe5O12) films have been deposited with aerosol deposition method. We investigated the deposition rate, crystallinity, magnetic and optical properties dependent on carrier gas flow rate (0.5 L/min ~ 8 L/min) and annealing temperature. With increasing annealing temperature, the crystallinity of Bi:YIG film was improved and the saturation magnetization increased to reach to 1.1 kG at 800 C. The magneto-optical effect, Faraday rotation, increased to 1.4 deg/ m by annealing at 700 C around the wavelength of 0.5 m. The optical transmittance of the Bi:YIG film was also improved in visible region.
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