PZT cantilever array integrated with piezoresistor sensor for high speed parallel operation of AFM

Kim, Young‐Sik; Nam, Hojung; Cho, Seong-Moon; Hong, Jae Won; Kim, Dong-Chun; Bu, Jong Uk

doi:10.1016/s0924-4247(02)00311-4

Cited by 53 publications

(32 citation statements)

References 7 publications

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“…The detection of the cantilever deflection is done mostly by means of a laser, which is costly and makes the adjustment and cantilever exchange very time consuming, in particular, when operating in a vacuum environment. To overcome these limitations, AFM probes with integrated detection schemes such as capacitive (13), piezoelectric or piezoresistive schemes (10,(14)(15)(16)(17), and highspeed scanning systems that rely on arrays of cantilevers featuring piezoelectric excitation and piezoresistive͞piezoelectric readout (10,(18)(19)(20) have been developed. All of those systems, however, require a larger set of desktop equipment because no integrated electronics or functions are provided.…”

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confidence: 99%

Single-chip mechatronic microsystem for surface imaging and force response studies

Hafizovic

Barrettino

Volden

et al. 2004

Proc. Natl. Acad. Sci. U.S.A.

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We report on a stand-alone single-chip (7 ؋ 10 mm) atomic force microscopy unit including a fully integrated array of cantilevers, each of which has an individual actuation, detection, and control unit so that standard atomic force microscopy operations can be performed by means of the chip only without any external controller. The system offers drastically reduced overall size and costs as well as increased scanning speed and can be fabricated with standard complementary metal oxide semiconductor technology with some subsequent micromachining steps to form the cantilevers. Full integration of microelectronic and micromechanical components on the same chip allows for the controlling and monitoring of all system functions. The on-chip circuitry, which includes analog signal amplification and filtering stages with offset compensation, analog-to-digital converters, a powerful digital signal processor, and an on-chip digital interface for data transmission, notably improves the overall system performance. The microsystem characterization evidenced a vertical resolution of <1 nm and a force resolution of <1 nN as shown in the measurement results. The monolithic system represents a paradigm of a mechatronic microsystem that allows for precise and fully controlled mechanical manipulation in the nanoworld.atomic force microscopy ͉ cantilever ͉ complementary metal oxide semiconductor N ew measurement, metrology, and imaging techniques have been pivotal to the rapid development of many branches of science such as materials science, microelectronics, and microbiology, to name a few. The invention of the scanning-tunneling microscope by Binning and Rohrer in 1982 (1) and, in particular, the invention of the atomic force microscope (AFM) in 1986 (2) have established a basis for many findings in various scientific areas over the last years. The AFM has evolved at an exceptional speed from a laboratory prototype to a commercial instrument (consider, e.g., Veeco Instruments, Woodbury, NY) and many other scanning probe techniques (3) have been developed, which will not be further mentioned here. The AFM has been used to measure forces during stretching of DNA strands (4) and rupture forces of single covalent bonds (5) and can be operated in liquids, which enables its use in biological applications (6-8). The AFM also can be used to perform surface manipulations such as lithographic fabrication of a transistor (9, 10) or AFM-based data storage (11,12).Commercially available AFM instruments are rather bulky and have a low throughput because of the serial nature of the involved scanning process and the limited scanning range, which renders the investigation of larger samples rather laborious. The detection of the cantilever deflection is done mostly by means of a laser, which is costly and makes the adjustment and cantilever exchange very time consuming, in particular, when operating in a vacuum environment. To overcome these limitations, AFM probes with integrated detection schemes such as capacitive (13), piezoelectric or piezore...

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mentioning

confidence: 99%

Single-chip mechatronic microsystem for surface imaging and force response studies

Hafizovic

Barrettino

Volden

et al. 2004

Proc. Natl. Acad. Sci. U.S.A.

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“…Data storage applications were investigated as part of the "Millipede" program at IBM [58]. A PZT cantilever array with piezoresistive detection was reported in [59]. The Millipede represents the largest and densest 2-D array (32X32, 1024 cantilevers) of AFM cantilevers to date.…”

Section: The Role Of Mems In Scanning Probe Microscopymentioning

confidence: 99%

Single‐Chip Scanning Probe Microscopes

Sarkar

Mansour²

2015

Micro‐ and Nanomanipulation Tools

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Scanning probe microscopes (SPMs) are the highest resolution imaging instruments available today and are among the most important tools in nanoscience. Conventional SPMs suffer from several drawbacks owing to their large and bulky construction and to the use of piezoelectric materials. Large scanners have low resonant frequencies that limit their achievable imaging bandwidth and render them susceptible to disturbance from ambient vibrations. Array approaches have been used to alleviate the bandwidth bottleneck; however as arrays are scaled upwards, the scanning speed must decline to accommodate larger payloads. In addition, the long mechanical path from the tip to the sample contributes thermal drift. Furthermore, intrinsic properties of piezoelectric materials result in creep and hysteresis, which contribute to image distortion. The tip-sample interaction signals are often measured with optical configurations that require large free-space paths, are cumbersome to align, and add to the high cost of state-of-the-art SPM systems. These shortcomings have stifled the widespread adoption of SPMs by the nanometrology community. Tiny, inexpensive, fast, stable and independent SPMs that do not incur bandwidth penalties upon array scaling would therefore be most welcome. A method to increase the quality factor (Q-factor) of flexural resonators is introduced. The method relies on an internal energy pumping mechanism that is based on the interplay between electrical, iv mechanical, and thermal effects. To the best of the author's knowledge, the devices that are designed to harness these effects possess the highest electromechanical Qs reported for flexural resonators operating in air; electrically measured Q is enhanced from ~50 to ~50,000 in one exemplary device. A physical explanation for the underlying mechanism is proposed.The design, fabrication, imaging, and tip-based lithographic patterning with the first single-chip Scanning Thermal Microscopes (SThMs) are also presented. In addition to 3 DOF scanning, these devices possess integrated, thermally isolated temperature sensors to detect heat transfer in the tip-sample region.Imaging is reported with thermocouple-based devices and patterning is reported with resistive heater/sensors. An "isothermal electrothermal scanner" is designed and fabricated, and a method to operate it is detailed. The mechanism, based on electrothermal actuation, maintains a constant temperature in a central location while positioning a payload over a range of >35μm, thereby suppressing the deleterious thermal crosstalk effects that have thus far plagued thermally actuated devices with integrated sensors.

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“…The temperature dependence and low strain range have resulted in piezoresistive sensors primarily being used in micro-fabricated devices (e.g. for atomic force microscope (AFM) [67] and MEMS pressure sensors [68]). Similar to resistive strain gauges, the noise in piezoresistive sensors is predominantly thermal and 1/f noise.…”

Section: Strain Sensorsmentioning

confidence: 99%

Displacement Measurement

Leach¹

2014

Fundamental Principles of Engineering Nanometrology

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PZT cantilever array integrated with piezoresistor sensor for high speed parallel operation of AFM

Cited by 53 publications

References 7 publications

Single-chip mechatronic microsystem for surface imaging and force response studies

Single-chip mechatronic microsystem for surface imaging and force response studies

Single‐Chip Scanning Probe Microscopes

Displacement Measurement

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