Displacement Measurement

Leach, Richard

doi:10.1016/b978-1-4557-7753-2.00005-0

Cited by 41 publications

(45 citation statements)

References 79 publications

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“…As in the ISO/IEC Guide 99:2007 [6] stated and in [7] mentioned: "Traceability is the property of the result of a measurement whereby it can be related to stated references, usually national or international standards, through a documented unbroken chain of comparisons all having stated uncertainties".…”

Section: Uncertainty Analysesmentioning

confidence: 99%

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Calculation of measurement uncertainty for plastic (ABS) material in flexural testing

Günay

Fank

Gülmez

et al. 2013

Int. J. Metrol. Qual. Eng.

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Abstract. In order to determine mechanical properties of materials various kind of tests can be applied by means of using their tensile strength, lower yield stress, proof stress, impact strength, Brinell, Rockwell and surface hardness, elongation after fracture properties. Among these tests, three point flexural testing method has some advantages such as easy preparation (production) of samples and no gripping problems comparing to tension test. Flexural tests results should be obtained accurately to provide expected testing performance. The measurement uncertainty of flexural tests should be calculated by conducting all effective uncertainty parameters during the test procedure. In this study, the measurement uncertainty of the flexural test of ABS (Acrylonitrile Butadiene Styrene) material was investigated, which is widely used as industrial plastic material in many applications.

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Section: Uncertainty Analysesmentioning

confidence: 99%

“…The measurement uncertainties of (U Eb3 ) and (U σf ) were calculated as given equations (6) and (7).…”

Section: Uncertainty Analysesmentioning

confidence: 99%

Calculation of measurement uncertainty for plastic (ABS) material in flexural testing

Günay

Fank

Gülmez

et al. 2013

Int. J. Metrol. Qual. Eng.

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show abstract

“…The roundness of an artifact is measured by subjecting it to a high quality rotation and by monitoring its surface with a fixed probe. Based on the definition of the 'metrology loop', which is a reference frame for displacement measurement, independent of the instrument base [12,13], conventional machines typically have a serial metrology loop, representing a conceptual line going through all solids, joints and probes. Serial structures are made of a succession of solids joined by linkages defining the degree of freedom of each solid.…”

Section: Analysis Of Conventional Equipmentmentioning

confidence: 99%

A newly conceived cylinder measuring machine and methods that eliminate the spindle errors

Vissiere¹,

Nouira²,

Damak³

et al. 2012

Meas. Sci. Technol.

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is an open access repository that collects the work of Arts et Métiers ParisTech researchers and makes it freely available over the web where possible. AbstractAdvanced manufacturing processes require improving dimensional metrology applications to reach a nanometric accuracy level. Such measurements may be carried out using conventional highly accurate roundness measuring machines. On these machines, the metrology loop goes through the probing and the mechanical guiding elements. Hence, external forces, strain and thermal expansion are transmitted to the metrological structure through the supporting structure, thereby reducing measurement quality. The obtained measurement also combines both the motion error of the guiding system and the form error of the artifact. Detailed uncertainty budgeting might be improved, using error separation methods (multi-step, reversal and multi-probe error separation methods, etc), enabling identification of the systematic (synchronous or repeatable) guiding system motion errors as well as form error of the artifact. Nevertheless, the performance of this kind of machine is limited by the repeatability level of the mechanical guiding elements, which usually exceeds 25 nm (in the case of an air bearing spindle and a linear bearing). In order to guarantee a 5 nm measurement uncertainty level, LNE is currently developing an original machine dedicated to form measurement on cylindrical and spherical artifacts with an ultra-high level of accuracy. The architecture of this machine is based on the 'dissociated metrological technique' principle and contains reference probes and cylinder. The form errors of both cylindrical artifact and reference cylinder are obtained after a mathematical combination between the information given by the probe sensing the artifact and the information given by the probe sensing the reference cylinder by applying the modified multi-step separation method.

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“…These structures may be used to create structural color from diffraction or plasmonic effects without using paint, and therefore lowering the impact on the environment [1]. These structures are usually examined using atomic force microscopy, scanning electron microscopy or spectroscopic scatterometry [2]. Of these methods only spectroscopic scatterometry is capable of fast, in-line, nondestructive, noninvasive measurements [3].…”

Section: Introductionmentioning

confidence: 99%

Modeling surface imperfections in thin films and nanostructured surfaces

Hansen¹,

Madsen²,

Jensen³

et al. 2017

SPIE Proceedings

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Accurate scatterometry and ellipsometry characterization of non-perfect thin films and nanostructured surfaces are challenging. Imperfections like surface roughness make the associated modelling and inverse problem solution difficult due to the lack of knowledge about the imperfection on the surface. Combining measurement data from several instruments increases the knowledge of non-perfect surfaces. In this paper, we investigate how to incorporate this knowledge of surface imperfection into inverse methods used in scatterometry and ellipsometry via Rigorous Coupled Wave Analysis. Three classes of imperfections are examined. The imperfections are introduced as periodic structures with super cell periods ten times larger than the simple grating period. Two classes of imperfections concern the grating and one class concern the substrate. It is shown that imperfections of a few nanometers can severely change the reflective response on silicon gratings. Inverse scatterometry analysis of gratings with imperfections using simulated data with white noise has been performed. The results show that scatterometry is a robust technology that is able to characterize grating imperfections provided that the imperfection class is known.

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Displacement Measurement

Cited by 41 publications

References 79 publications

Calculation of measurement uncertainty for plastic (ABS) material in flexural testing

Calculation of measurement uncertainty for plastic (ABS) material in flexural testing

A newly conceived cylinder measuring machine and methods that eliminate the spindle errors

Modeling surface imperfections in thin films and nanostructured surfaces

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