Pushing the limits of lithography

Ito, Takashi; Okazaki, Shinji

doi:10.1038/35023233

Cited by 779 publications

(557 citation statements)

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“…86 Electron-and ion-beam lithography offer high resolution control of features, but these methods are also low-throughput and expensive. [86][87][88] Photolithography is a highthroughput and relatively inexpensive method that allows the controlled fabrication of patterned structures, but objects that are created by photolithography can be no smaller than the diffraction limit of the optical device used during the exposure step. 89 Efforts to overcome this restraint include reaching further into the ultraviolet light range or using X-ray lithography.…”

Section: Controlled Silver Nanoparticle Dissolution Experimentsmentioning

confidence: 99%

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Controlled Evaluation of Silver Nanoparticle Dissolution Using Atomic Force Microscopy

Kent

Vikesland

2012

Environ. Sci. Technol.

126

129

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Incorporation of silver nanoparticles (AgNPs) into an increasing number of consumer products has led to concern over the potential ecological impacts of their unintended release to the environment. Dissolution is an important environmental transformation that affects the form and concentration of AgNPs in natural waters; however, studies on AgNP dissolution kinetics are complicated by nanoparticle aggregation. Herein, nanosphere lithography (NSL) was used to fabricate uniform arrays of AgNPs immobilized on glass substrates. Nanoparticle immobilization enabled controlled evaluation of AgNP dissolution in an air-saturated phosphate buffer (pH 7, 25 °C) under variable NaCl concentrations in the absence of aggregation. Atomic force microscopy (AFM) was used to monitor changes in particle morphology and dissolution. Over the first day of exposure to ≥10 mM NaCl, the in-plane AgNP shape changed from triangular to circular, the sidewalls steepened, and the height increased by 6-12 nm. Subsequently, particle height and inplane radius decreased at a constant rate over a 2-week period. Dissolution rates varied linearly from 0.4 to 2.2 nm/d over the 10-550 mM NaCl concentration range tested. NaCl-catalyzed dissolution of AgNPs may play an important role in AgNP fate in saline waters and biological media. This study demonstrates the utility of NSL and AFM for the direct investigation of unaggregated AgNP dissolution.iii Acknowledgements I thank my advisor, Dr. Peter Vikesland, for his insight, guidance, and innovative ideas throughout my time at Virginia Tech, and for giving me the opportunity to work on this research project. He was ready and available to help whenever I needed his input. I also thank the other members of my committee,

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Section: Controlled Silver Nanoparticle Dissolution Experimentsmentioning

confidence: 99%

“…89 Efforts to overcome this restraint include reaching further into the ultraviolet light range or using X-ray lithography. 87,89 For the purposes of this study, nanosphere lithography (NSL) has been chosen since it is a versatile, inexpensive, and high-throughput lithographic technique. 86…”

Section: Controlled Silver Nanoparticle Dissolution Experimentsmentioning

confidence: 99%

Controlled Evaluation of Silver Nanoparticle Dissolution Using Atomic Force Microscopy

Kent

Vikesland

2012

Environ. Sci. Technol.

126

129

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“…The directed-or selfassembly of particles, also known as the ''bottom-up'' strategy, has great potential to overcome size limitations and processing restrictions of current ''top-down'' manufacturing processes, such as photolithography. [32][33][34][35] The anisotropic nature of the patchy particle surface enables a certain degree of control over the assembly process, since the specific interactions with and between patches can provide a driving force for assembly of a targeted structure. Several computational studies on the self-assembly of patchy particles have been reported and these have pushed the imagination of the patchy particle community to new heights.…”

Section: Introductionmentioning

confidence: 99%

Fabrication, Assembly, and Application of Patchy Particles

Pawar

Kretzschmar

2010

Macromol. Rapid Commun.

444

411

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The site‐specific engineering of colloidal surfaces has provided a powerful approach to pushing the boundaries of today's materials research. The resulting surface‐anisotropic and patchy particles have become the center of vital research areas, ranging from the need for large‐scale fabrication techniques to exploring new applications of these materials. This Review summarizes patchy particle fabrication techniques, including but not limited to particle and nanosphere lithography and glancing‐angle deposition. The variety of existing patchy particle fabrication techniques is revealed and the need for a scalable approach to high‐volume patchy particle production is identified. Ongoing modeling efforts describing patchy particle interactions and properties are reviewed as potential predictive tools. Research endeavors that deal with the directed assembly of patchy particles in electric and magnetic fields, as well as with supraparticular assembly through chemical interactions, are discussed. The Review is concluded with a note on the future application of patchy particles as phoretic motors.magnified image

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“…For example, in semiconductor architectures, nanorod ensembles allow for potential miniaturization significantly beyond the lithographic limit. 8 Spherical, columnar and branched nanocrystals have been shown to exhibit single electron transistor behaviour. [9][10][11] Vertical alignment of semiconductor nanorods in an organised assembly would potentially allow each rod (single electron transitor) in a 2D array to be contacted individually at the end facet for macroscopic integration at < 5 nm separation.…”

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confidence: 99%