2003
DOI: 10.1016/s0038-1101(02)00408-2
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Pulsed laser deposition of manganese doped GaN thin films

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Cited by 18 publications
(17 citation statements)
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“…MOCVD, MBE, diffusion, sputtering, pulsed laser deposition, etc, are used for the fabrication of GaN based DMS materials [4][5][6][7][8].…”
Section: Introductionmentioning
confidence: 99%
“…MOCVD, MBE, diffusion, sputtering, pulsed laser deposition, etc, are used for the fabrication of GaN based DMS materials [4][5][6][7][8].…”
Section: Introductionmentioning
confidence: 99%
“…The study of atomic vapor is one of the key steps in the isotope separation process, and one of the methods for producing vapor is laser ablation. Laser ablation is a powerful tool for many different applications including thin film deposition, 3,4 ion sources 5 (for ion implantation and particle accelerators), analytical purposes, 6 and as already mentioned, isotope separation. 79 Plume formation is very complex and depends on the laser, material, and surrounding media parameters.…”
Section: Introductionmentioning
confidence: 99%
“…This proved an obstacle to obtaining the required magnetic semiconductor film properties for device fabrication. The Pulsed laser deposition (PLD) can be used to prepare thin films from multicomponent targets and allows Mn concentrations in the GaN films to be controlled easily by varying the quantity of Mn included in the initial target preparation [60]. The growth conditions can be far from equilibrium, which offers the possibility of reaching higher Mn concentrations without phase separation [60].…”
Section: Gan Nanostructured Materials Dopingmentioning
confidence: 99%