Pulsed Laser Deposition as a Tool for the Development of All Solid‐State Microbatteries

Indrizzi, Luca; Ohannessian, Natacha; Pergolesi, Daniele; Lippert, Thomas; Gilardi, Elisa

doi:10.1002/hlca.202000203

Cited by 19 publications

(25 citation statements)

References 168 publications

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“…Pulsed-laser deposition (PLD) is a physical vapor deposition technique capable of growing multicomponent oxide thin films with controllable crystallinity, microstructure, and nanoscale morphology, and is thereby widely used in structure-property relation research of electrochemical, dielectric, ferroelectric, magnetic, and high-temperature superconducting fields [6][7][8][9][10]. KrF excimer lasers with 248 nm wavelength and 20-35 ns pulse duration are the most commonly used laser source, while solid-state lasers, such as frequency quadrupled Nd:YAG with a 266 nm wavelength and 5-10 ns pulse duration, have been gradually becoming more popular recently due to nontoxicity and small volume for convenient transport and placement [11].…”

Section: Introductionmentioning

confidence: 99%

Growth of nanoporous high-entropy oxide thin films by pulsed laser deposition

Guo

Wang

Dupuy

et al. 2022

Journal of Materials Research

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High-entropy oxides (HEO) with entropic stabilization and compositional flexibility have great potential application in batteries and catalysis. In this work, HEO thin films were synthesized by pulsed laser deposition (PLD) from a rock-salt (Co0.2Ni0.2Cu0.2Mg0.2Zn0.2)O ceramic target. The films exhibited the target’s crystal structure, were chemically homogeneous, and possessed a three-dimensional (3D) island morphology with connected randomly shaped nanopores. The effects of varying PLD laser fluence on crystal structure and morphology were explored systematically. Increasing fluence facilitates film crystallization at low substrate temperature (300 °C) and increases film thickness (60–140 nm). The lateral size of columnar grains, islands (19 nm to 35 nm in average size), and nanopores (9.3 nm to 20 nm in average size) increased with increasing fluence (3.4 to 7.0 J/cm2), explained by increased kinetic energy of adatoms and competition between deposition and diffusion. Additionally, increasing fluence reduces the number of undesirable droplets observed on the film surface. The nanoporous HEO films can potentially serve as electrochemical reaction interfaces with tunable surface area and excellent phase stability. Graphical abstract

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Section: Introductionmentioning

confidence: 99%

Growth of nanoporous high-entropy oxide thin films by pulsed laser deposition

Guo

Wang

Dupuy

et al. 2022

Journal of Materials Research

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“…The article of pulsed laser deposition as a tool for the development of all solid‐state microbatteries well summarized various contributions towards qualities of thin‐film batteries. [ 312 ]…”

Section: Technologies For Thin‐film μ‐Batteriesmentioning

confidence: 99%

“…The article of pulsed laser deposition as a tool for the development of all solid-state microbatteries well summarized various contributions towards qualities of thin-film batteries. [312] One of the technologies named as aerosol deposition (AD) and also called powder aerosol deposition (PAD) is worth mentioning. Figure 28a schematically illustrates the deposition system.…”

Section: Technologies For Thin-film 𝝁-Batteriesmentioning

confidence: 99%

“…There are many available deposition technologies for thin film growth, including sol-gel method, [301][302][303][304] inkjet printing, [305,306] rf-sputtering, [174,206,210,229,230,258,307,308] plasma spray PVD (PS-PVD), [309] PLD, [310,311,312] chemical vapor deposition (CVD), [313] aerosol deposition, [314] ion-beam assisted deposition, [315] and ebeam evaporation. [316] The review article by Lobe et al [308] well documented various deposition technologies.…”

Section: Technologies For Thin-film 𝝁-Batteriesmentioning

confidence: 99%

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All‐Solid‐State Thin Film μ‐Batteries for Microelectronics

Dai

et al. 2021

Advanced Science

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Continuous advances in microelectronics and micro/nanoelectromechanical systems enable the use of microsized energy storage devices, namely solid-state thin-film -batteries. Different from the current button batteries, the -battery can directly be integrated on microchips forming a very compact "system on chip" since no liquid electrolyte is used in the -battery. The all-solid-state battery (ASSB) that uses solid-state electrolyte has become a research trend because of its high safety and increased capacity. The solid-state thin-film -battery belongs to the family of ASSB but in a small format. However, a lot of scientific and technical issues and challenges are to be resolved before its real application, including the ionic conductivity of the solid-state electrolyte, the electrical conductivity of the electrode, integration technologies, electrochemical-induced strain, etc. To achieve this goal, understanding the processing of thin films and fundamentals of ion transfer in the solid-state electrolytes and hence in the -batteries becomes utmost important. This review therefore focuses on solid-state ionics and provides inside of ion transportation in the solid state and effects of chemistry on electrochemical behaviors and proposes key technology for processing of the -battery.

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“…Thus, LIBS also offers the compelling advantages of fast detection speed, high spatial resolved sensitivity up to trace levels in any type of sample matrix 2,3,[5][6][7] , as well as broad element coverage from light to heavy element detection. So far, much work has focused on the LIBS for elemental and quantitative analysis in the wavelength range from VUV 8 to UV-VIS 5,7,9,10 . Nevertheless, LIBS has also a few unavoidable limitations, such as high uncertainty of the signal, poor precision and repeatability of the signal because of the shot-to-shot fluctuations and noise 1,11,12 .…”

Section: Introductionmentioning

confidence: 99%

Dual spectrometer for simultaneous visible and extreme ultraviolet LIBS

Trottmann

Wyder

et al. 2021

International Conference on X-Ray Lasers 2020

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Laser-induced breakdown spectroscopy (LIBS) is an elemental analysis method thanks to minor sample preparation, rapid analysis, and a spatially resolved sensitivity down to trace level in any kind of sample matrix. State-of-the-art LIBS is operated in the optical spectral range (UV-Vis). Unfortunately, the application of LIBS in material detection is limited by the low precision and repeatability. This is particularly critical for inhomogeneous materials and alternative methods are desirable. Light elements such as Li, as well as F, are difficult to be characterized. The dual LIBS performance was initially studied in a simpler matrix such as LiF, radially collecting simultaneously the XUV and OES spectra from the same laser shot. For the case of LiF, XUV signals proved significantly more stable than in the case of LIBS-OES. The signal of F can be also seen clearly in the spectrum. Observation of the plasma emission at even shorter wavelengths in the extreme ultraviolet (wavelength range 5-20 nm) is supposed to improve the state-of-art limitations of LIBS.

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Pulsed Laser Deposition as a Tool for the Development of All Solid‐State Microbatteries

Cited by 19 publications

References 168 publications

Growth of nanoporous high-entropy oxide thin films by pulsed laser deposition

Growth of nanoporous high-entropy oxide thin films by pulsed laser deposition

All‐Solid‐State Thin Film μ‐Batteries for Microelectronics

Dual spectrometer for simultaneous visible and extreme ultraviolet LIBS

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