All‐Solid‐State Thin Film μ‐Batteries for Microelectronics

Abstract

Continuous advances in microelectronics and micro/nanoelectromechanical systems enable the use of microsized energy storage devices, namely solid-state thin-film -batteries. Different from the current button batteries, the -battery can directly be integrated on microchips forming a very compact "system on chip" since no liquid electrolyte is used in the -battery. The all-solid-state battery (ASSB) that uses solid-state electrolyte has become a research trend because of its high safety and increased capacity. The solid-state thin-film -battery belongs to the family of ASSB but in a small format. However, a lot of scientific and technical issues and challenges are to be resolved before its real application, including the ionic conductivity of the solid-state electrolyte, the electrical conductivity of the electrode, integration technologies, electrochemical-induced strain, etc. To achieve this goal, understanding the processing of thin films and fundamentals of ion transfer in the solid-state electrolytes and hence in the -batteries becomes utmost important. This review therefore focuses on solid-state ionics and provides inside of ion transportation in the solid state and effects of chemistry on electrochemical behaviors and proposes key technology for processing of the -battery.

Crafting a Next-Generation Device Using Iron Oxide Thin Film: A Review

“…This battery further could be directly integrated into a microchip forming a compact system on chip because no liquid electrolyte was used in the iron oxide thin film-based μ-battery. 194 This result then indicates that the iron oxide thin film could be integrated as a battery in next-generation electronic devices.…”

“…In 2021, Wu et al compiled all-solid-state thin film battery studies, including iron oxide thin film that possibly could be used in the so-called μ-battery. This battery further could be directly integrated into a microchip forming a compact system on chip because no liquid electrolyte was used in the iron oxide thin film-based μ-battery . This result then indicates that the iron oxide thin film could be integrated as a battery in next-generation electronic devices.…”

Enhanced Interfacial Kinetics and High Rate Performance of LiCoO2 Thin-Film Electrodes by Al Doping and In Situ Al2O3 Coating

“… 1 − 7 Microelectronic devices are limited in size, and their energy storage devices need to be adapted to them in terms of space and structure. 8 , 9 The all-solid-state thin-film lithium battery is widely regarded for its high energy density, small size, safety, and structural designability, which can better meet the above requirements. 10 − 14 However, its application is limited by its thin electrode and low active material leading to low areal energy density and small overall capacity.…”

“…With the development of technology, microelectronic devices such as flexible electronics, wearable smart devices, and portable electronics are being used increasingly widely. − Microelectronic devices are limited in size, and their energy storage devices need to be adapted to them in terms of space and structure. , The all-solid-state thin-film lithium battery is widely regarded for its high energy density, small size, safety, and structural designability, which can better meet the above requirements. − However, its application is limited by its thin electrode and low active material leading to low areal energy density and small overall capacity. Increasing the thickness of the active electrode (mainly the cathode) is an important way to improve the areal energy density and capacity of the thin-film battery.…”

Advanced Three-Dimensional Microelectrode Architecture Design for High-Performance On-Chip Micro-Supercapacitors

“…Advancing science and technology facilitates the development of modern electronic devices toward high performance, multifunction, and miniaturization. − As a result, miniaturized energy storage devices (MESDs) are urgently requested for providing high energy and power densities as micropower sources. − Even though their compatible sizes are reduced down to micron or even nanometer scale, ideal MESDs still present a large amount of energy storage and rapid charge/discharge capability. Among various MESDs, microbatteries (MBs) and micro-supercapacitors (MSCs) are two complementary candidates for efficient charge storage. − Similar to conventional energy storage devices ( e.g ., lithium-ion batteries, sodium-ion batteries, zinc-ion batteries), − MBs deliver high energy density but relatively low power density, − while MSCs exhibit superior high power density but inferior energy density. − Despite the distinct difference in energy storage mechanisms, their electrochemical processes involve both ion transport and electron transport inside the active materials. These trade-offs enable a big challenge to achieve simultaneously high energy and power densities.…”