Protective diamond-like carbon coatings for future optical storage disks

Piazza, Fabrice; Grambole, D.; Schneider, Dieter; Casiraghi, Cinzia; Ferrari, AC; Robertson, John

doi:10.1016/j.diamond.2004.12.028

Cited by 97 publications

(37 citation statements)

References 26 publications

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“…This question is especially important for the deposition of ultrathin ta-C films as wanted for protective coatings in the data storage industry [70][71][72][73][74]. Lower energy will reduce the thickness of the intermixed layer but the energetic conditions for sp 3 -rich material would be violated.…”

Section: Graded Layers Ultrathin Films Multilayers Nanolaminatesmentioning

confidence: 99%

Metal plasmas for the fabrication of nanostructures

Anders¹

2007

J. Phys. D: Appl. Phys.

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A review is provided covering metal plasma production, the energetic condensation of metal plasmas, and the formation of nanostructures using such plasmas. Plasma production techniques include pulsed laser ablation, filtered cathodic arcs, and various forms of ionized physical vapor deposition, namely magnetron sputtering with ionization of sputtered atoms in radio frequency discharges, self-sputtering, and high power impulse magnetron sputtering. The discussion of energetic condensation focuses on the control of kinetic energy by biasing and also includes considerations of the potential energy and the processes occurring at subplantation and implantation. In the final section on nanostructures, two different approaches are discussed. In the top-down approach, the primary nanostructures are lithographically produced and metal plasma is used to coat or fill trenches and vias. Additionally, multilayers with nanosize periods (nanolaminates) can be produced. In the bottom-up approach, thermodynamic forces are used to fabricate nanocomposites and nanoporous materials by decomposition and dealloying.

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Section: Graded Layers Ultrathin Films Multilayers Nanolaminatesmentioning

confidence: 99%

Metal plasmas for the fabrication of nanostructures

Anders¹

2007

J. Phys. D: Appl. Phys.

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“…2 When gas is used for actuation the permeability of such polymer membranes make stable positioning difficult. 3 Using thin film diamond will overcome these limits as diamond films are known to show exceptional hardness, 4 wear-resistance, 5 chemical stability, and high thermal conductivity 6 in addition to optical transparency from deep UV to far infrared. [7][8][9][10] In this paper we show that diamond thin films are also suitable for tuneable microlens applications which are planned to be implemented in arthroscopic microsurgery devices where biocompatibility, chemical stability, and optical properties are of high importance.…”

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confidence: 99%

Tuneable optical lenses from diamond thin films

Kriele

Williams

Wolfer

et al. 2009

Applied Physics Letters

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Nanocrystalline diamond (NCD) membranes of 150 nm thickness and diameters in the millimeter range grown by microwave-assisted chemical-vapor deposition were bulged to investigate their mechanical properties and their use as tuneable optical lenses. The NCD films were grown at different CH(ind 4)/H(ind 2) gas mixtures to vary the sp(exp 2)/sp(exp 3) ratio and thereby to tune their mechanical, optical, and surface morphology properties. By applying gas over pressure the membrane forms a lens shaped geometry. From deflection data we calculated Young's moduli which decrease with increasing CH(ind 4)/H(ind 2) ratio from 1160 GPa at 0.5% to 900 GPa at 7%. Optical lens applications show a variation in the focal point from infinity to 3.5 mm. The data indicate that NCD is a promising material for tuneable optical lenses applications

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“…[1][2][3][4][5] Unlike rough polycrystalline diamond films which are synthesized by CVD, typically at above 700 8C, DLC films may be produced at room temperature and are extremely smooth. DLC films have been widely used as protective coatings in areas such as magnetic storage disks, optical windows, and micro-electromechanical devices.…”

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confidence: 99%