Deposition of Large‐Area and Protective Diamond‐like Carbon Coatings on Glass Substrates by Low‐Pressure Dielectric Barrier Discharges

Abstract

Large-area (370mm x 500mm) diamond-like carbon (DLC) films were deposited on the glass substrate by low-pressure dielectric barrier discharges. The deposited DLC films were hard, homogeneous and extremely smooth. The DLC film deposited on the large-area glass can be potentially used as a scratch resistant and corrosion barrier layer.National Natural Science Foundation of China [10875025, 20803007