Properties of TiO 2  thin films deposited by rf reactive magnetron sputtering on biased substrates

Nezar, Sawsen; Saoula, Nadia; Sali, S.; Faiz, M.; Mekki, M.B.; Laoufi, Nadia Aïcha; Tabet, Nouar

doi:10.1016/j.apsusc.2016.08.125

Cited by 82 publications

(43 citation statements)

References 42 publications

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“…In this work, we successfully deposited crystalline, homogeneous, rutile TiO 2 thin films with smooth surfaces by RF MS at RT, without any induced substrate bias and in a continuous gas flow. Nezar et al [26] similarly did not use any substrate bias or heating and they obtained predominantly anatase TiO 2 . This is easily explained by the fact that we used more RF power, which increased our sputtering yield, and a considerably higher vacuum, which increased the mean free path of our atoms/ions.…”

Section: Resultsmentioning

confidence: 99%

“…Crystalline TiO 2 (anatase, rutile or a mixture of both) was obtained either by controlling the O 2 flow and sputtering pressure [36,37], by applying a substrate bias voltage [3,17,38], or by annealing [39][40][41]. Nezar et al [26] managed to obtain crystalline TiO 2 by reactive magnetron sputtering without applying any substrate bias at RT, with predominantly anatase phase ( Table 4). The reason for obtaining anatase TiO 2 , as is the case for annealing amorphous TiO 2 [39][40][41], is that it requires less energy to form than the rutile phase.…”

Section: Discussionmentioning

confidence: 99%

“…The goal is to increase the energy of the incident ions, as rutile requires higher energy to crystalize than anatase [23][24][25]. This can be seen in the work of Nezar et al where, without any substrate bias, the deposited films consisted of anatase TiO 2 , and only after the application of a −75 V substrate bias could the peak for the rutile phase be noticed in XRD analysis [26].…”

Section: Introductionmentioning

confidence: 99%

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RF Magnetron Sputtering Deposition of TiO2 Thin Films in a Small Continuous Oxygen Flow Rate

et al. 2019

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Rutile titanium oxide (TiO 2 ) thin films require more energy to crystallize than the anatase phase of TiO 2 . It is a prime candidate for micro-optoelectronics and is usually obtained either by high substrate temperature, applying a substrate bias, pulsed gas flow to modify the pressure, or ex situ annealing. In the present work, we managed to obtain high enough energy at the substrate in order for the particles to form rutile TiO 2 at room temperature without any intentional substrate bias in a continuous gas flow. The rutile TiO 2 thin films were deposited by a reactive radiofrequency magnetron sputtering system from a titanium target, in an argon/oxygen gas mixture. Investigations regarding the film's structure and morphology were performed by X-ray diffraction (XRD), X-ray reflectivity (XRR), scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy (EDAX), while the optical properties were investigated by means of ellipsometry.

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Section: Resultsmentioning

confidence: 99%

Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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RF Magnetron Sputtering Deposition of TiO2 Thin Films in a Small Continuous Oxygen Flow Rate

et al. 2019

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“…With exception of sample S5, the spectra reveals small peaks at 25° e 55° associated to anatase phase of TiO 2 , and at 27° associated to rutile phase of TiO 2 , as well as peaks associated to iron, main material of substrate [12][13][14] . Sample S5 presented only the pronounced peak associated to the substrate, and a broad peak for the thin film, that was associated to the formation of amorphous titanium oxide 15 .…”

Section: Resultsmentioning

confidence: 99%

“…The spectra were identified using databases of Crystallography Open Database (COD), International Centre for Diffraction Data (ICDD), and published papers [12][13][14] . In order to investigate topography of surfaces and roughness, a Confocal Microscope, Leica DCM 3D, was employed.…”

Section: Methodsmentioning

confidence: 99%

TiO2 thin Films for Biofouling Applications

et al. 2017

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This work presents a study of TiO 2 thin films prepared by sputtering, for using as protection for biofouling action on marine structures. Titanium oxide thin films were prepared with different amount of oxygen on the surface of regular 1020 steel, a structural material for marine technology. The cristalline structure analysis evidenced the formation of anatase and rutile phases, as well as an amorphous phase of titanium oxide. Roughness measurements shown that the surface finish can contribute to the fixation of microorganisms. The crystalline TiO 2 thin films was evaluated as a potential biofouling protective coating. Contact angle measurements revealed that under UV-C light, the material evidenced a changing in wettability from hydrophobic to hydrophilic behavior, what is associated to the activation of photocatalytic reactions that is nocive for living beings on its surface. The effect of marine ambient on sample corroborates this conclusion, where after 6 months of exposure it was not sufficient for growing of biofouling on surface.

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Theoretical validation of experimental properties of TiO₂ prepared through organometallic precursors

Doubi

Hartiti

Siadat

et al. 2023

Applied Organom Chemis

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Our TiO 2 thin films were elaborated using spray pyrolysis technique. The spray solutions were prepared by two titanium precursors: titanium (IV) propoxide and titanium chloride. The elaborated thin films were analyzed with different characterization techniques such as X-ray diffraction (XRD), Raman spectroscopy, scanning electron microscopy (SEM), and UV-visible spectroscopy.These characterizations showed that the change of precursors from titanium chloride to titanium propoxide has a significant impact on all TiO 2 properties.The structural characterizations showed the formation of anatase TiO 2 and the crystallization improvement when the precursor changed from titanium chloride to titanium (IV) propoxide, which proves the superiority of our TiO 2 thin layers made without any type of annealing in comparison with other previous studies. The SEM images showed an improvement of the surface quality of the TiO 2 thin layers with the change of TiO 2 precursors' solution. The obtained optical properties confirmed the semiconducting properties of TiO 2 prepared by titanium propoxide with a large band gap equal to 3.28 eV and shifted to 3.18 eV. The refractive index increases from $1.75 to $2.14, while the porosity decreases. To confirm the experimental results, the Wien2K code, founded on the full-potential linearized augmented plane wave (FP-LAPW), has been used. The theoretical study has been done by applying the generalized gradient approximation (GGA), the modified Beck-Johnson (MBJ) exchange potential, and the local spin density approximation + Hubbard's parameter U (LSDA + U). The theoretical results varied with the variation of approximations. The obtained properties were improved with LSDA + U and acquired the real values of Eg, n, and k for anatase TiO 2 (like Eg = 3.214 eV). The obtained experimental and theoretical results could be considered superposable or better than other ones recently published.

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Properties of TiO 2 thin films deposited by rf reactive magnetron sputtering on biased substrates

Cited by 82 publications

References 42 publications

RF Magnetron Sputtering Deposition of TiO2 Thin Films in a Small Continuous Oxygen Flow Rate

RF Magnetron Sputtering Deposition of TiO2 Thin Films in a Small Continuous Oxygen Flow Rate

TiO2 thin Films for Biofouling Applications

Theoretical validation of experimental properties of TiO₂ prepared through organometallic precursors

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Properties of TiO 2 thin films deposited by rf reactive magnetron sputtering on biased substrates

Cited by 82 publications

References 42 publications

RF Magnetron Sputtering Deposition of TiO2 Thin Films in a Small Continuous Oxygen Flow Rate

RF Magnetron Sputtering Deposition of TiO2 Thin Films in a Small Continuous Oxygen Flow Rate

TiO2 thin Films for Biofouling Applications

Theoretical validation of experimental properties of TiO2 prepared through organometallic precursors

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Product

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Theoretical validation of experimental properties of TiO₂ prepared through organometallic precursors