RF Magnetron Sputtering Deposition of TiO2 Thin Films in a Small Continuous Oxygen Flow Rate

Simionescu, Octavian‐Gabriel; Romanițan, Cosmin; Tutunaru, Oana; Ion, Valentin; Buiu, O.; Avram, Andrei

doi:10.3390/coatings9070442

Cited by 46 publications

(14 citation statements)

References 42 publications

(63 reference statements)

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“…Remarkably, an increased catalyst concentration (HCL + AcAc for the case of TiO 2 film) has resulted in the higher refractive index value '2.6' . Similarly, Simionescu et al obtained the higher refractive www.nature.com/scientificreports/ index value '2.7' of the sputtered TiO 2 film, and assigned to the presence of mixed anatase and rutile phases 25 . Accordingly, we can also observe the appearance of rutile peaks at 2θ = 27.44°, 41.22°, and 44° corresponding to the planes (110), (111), and (210) in addition to the anatase peaks as shown in Fig.…”

Section: Resultsmentioning

confidence: 88%

Rapid and economic fabrication approach of dielectric reflectors for energy harvesting applications

Yepuri

Dubey²,

Kumar

2020

Sci Rep

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Dielectric reflectors are the passive components that have their potential demands for various purposes, such as back-end reflector in solar cells, the band pass filters in optical instruments, thermal reflector and so on. Though well-established techniques for manufacturing such reflectors are available, the demand for their low-cost production with a minimum number of coatings has attracted the attention of the scientific community. In this framework, this paper addresses the process optimization for the low-cost and rapid fabrication of dielectric TiO2/SiO2 reflectors with 100% reflectance. Numerous studies are carried out to explore the structural, morphological, and optical characteristics of reflectors. We summarize that the desired reflection band of a selective-wavelength range can be realized by varying the precursor and catalyst concentrations, annealing cycle, and the spin rate. With this, we noticed the shifting of reflection window from the visible (Vis) to near-infrared (NIR) wavelength region using reflectors of merely 2.5 stacks of TiO2/SiO2 films. We also performed the thermal response of the reflector by radiating an infrared light source and observed an exceptional performance indicating its thermal shielding application.

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Section: Resultsmentioning

confidence: 88%

Rapid and economic fabrication approach of dielectric reflectors for energy harvesting applications

Yepuri

Dubey²,

Kumar

2020

Sci Rep

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“…It is noticed that almost all samples except the 16 μm samples showed higher adhesion rate compared with flat sample. The reason was not explained but could be that the radio frequency (RF) sputtering deposited TiO 2 surface could has small roughness [ 65 ] which might reduce the adhesion of platelets. In summary, the nanopillar surface can be designed to control platelet adhesion, indicating the possibility of application for stent surface topography.…”

Section: Effects Of Topography and Surface Chemistry On Stentsmentioning

confidence: 99%

Surface engineering and the application of laser-based processes to stents - A review of the latest development

Dong

Pacella

Liu

et al. 2022

Bioactive Materials

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Late in-stent thrombus and restenosis still represent two major challenges in stents’ design. Surface treatment of stent is attracting attention due to the increasing importance of stenting intervention for coronary artery diseases. Several surface engineering techniques have been utilised to improve the biological response in vivo on a wide range of biomedical devices. As a tailorable, precise, and ultra-fast process, laser surface engineering offers the potential to treat stent materials and fabricate various 3D textures, including grooves, pillars, nanowires, porous and freeform structures, while also modifying surface chemistry through nitridation, oxidation and coatings. Laser-based processes can reduce the biodegradable materials' degradation rate, offering many advantages to improve stents’ performance, such as increased endothelialisation rate, prohibition of SMC proliferation, reduced platelet adhesion and controlled corrosion and degradation. Nowadays, adequate research has been conducted on laser surface texturing and surface chemistry modification. Laser texturing on commercial stents has been also investigated and a promotion of performance of laser-textured stents has been proved. In this critical review, the influence of surface texture and surface chemistry on stents performance is firstly reviewed to understand the surface characteristics of stents required to facilitate cellular response. This is followed by the explicit illustration of laser surface engineering of stents and/or related materials. Laser induced periodic surface structure (LIPSS) on stent materials is then explored, and finally the application of laser surface modification techniques on latest generation of stent devices is highlighted to provide future trends and research direction on laser surface engineering of stents.

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“…This technique allows the deposition of oxide compound films by introducing oxygen (O 2 ) gas into the plasma, which is typically formed by an inert gas such as argon (Ar). [33][34][35][36] Besides, the method can easily adjust the deposition parameters and offers a high deposition rate for large-scale production.…”

Section: Introductionmentioning

confidence: 99%

“…However, the direct current (DC) magnetron sputtering method has many advantages such as good control over the composition and structure of the films, extremely high film‐substrate adhesion, excellent uniformity on large‐area substrates, and the ability to coat heat‐sensitive substrates. This technique allows the deposition of oxide compound films by introducing oxygen (O 2 ) gas into the plasma, which is typically formed by an inert gas such as argon (Ar) 33–36 . Besides, the method can easily adjust the deposition parameters and offers a high deposition rate for large‐scale production.…”

Section: Introductionmentioning

confidence: 99%

Structural properties and surface oxidation states of sputter‐deposited TiO_2−x thin films

Jana¹,

Debnath

Bahadur

et al. 2021

Surface & Interface Analysis

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Titanium dioxide (TiO2−x) films were deposited on silicon (100) substrates from pure titanium (Ti) targets using direct current magnetron sputtering technique. TiO2−x thin films were grown in the thickness range of 515–672 Å with varying sputter powers of 75 and 100 W, at both room temperature (RT) and 200°C substrate temperature (Ts). Structural and compositional characterization of the films, which included surface morphology and study of surface chemical states, was performed. The influences of sputter power and substrate temperature on these parameters were specifically analyzed. Grazing incidence X‐ray diffraction showed that the thin films were amorphous at RT and crystallinity could be achieved only at Ts. The latter showed anatase phase at sputter power of 75 W and transformed into anatase–rutile mixed phase at 100 W. The thickness, roughness, and mass density of the thin films were measured using X‐ray reflectivity. It was observed that for Ts films, the roughness and mass density increased with higher sputter power. Field emission scanning electron microscopy and atomic force microscopy also corroborated this surface roughness result. It was observed from X‐ray photoelectron spectroscopy that the core levels of Ti‐2p3/2 and O‐1s and their corresponding binding energies indicated that only one of the Ti oxidation states, i.e., Ti4+, existed in the films. This work provides insight about the growth of TiO2−x thin films influenced by Ts deposition and different sputter power.

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RF Magnetron Sputtering Deposition of TiO2 Thin Films in a Small Continuous Oxygen Flow Rate

Cited by 46 publications

References 42 publications

Rapid and economic fabrication approach of dielectric reflectors for energy harvesting applications

Rapid and economic fabrication approach of dielectric reflectors for energy harvesting applications

Surface engineering and the application of laser-based processes to stents - A review of the latest development

Structural properties and surface oxidation states of sputter‐deposited TiO_2−x thin films

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RF Magnetron Sputtering Deposition of TiO2 Thin Films in a Small Continuous Oxygen Flow Rate

Cited by 46 publications

References 42 publications

Rapid and economic fabrication approach of dielectric reflectors for energy harvesting applications

Rapid and economic fabrication approach of dielectric reflectors for energy harvesting applications

Surface engineering and the application of laser-based processes to stents - A review of the latest development

Structural properties and surface oxidation states of sputter‐deposited TiO2−x thin films

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Product

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Structural properties and surface oxidation states of sputter‐deposited TiO_2−x thin films