Properties of Diamond-Like Carbon Films Fabricated by the Filtered Cathodic Vacuum Arc Method

Inaba, Hiroshi; Fujimaki, Shigehiko; Sasaki, Shinji; Hirano, Shinya; Todoroki, S.; Furusawa, K.; Yamasaka, M.; Xu, Shaohui

doi:10.1143/jjap.41.5730

Cited by 10 publications

(5 citation statements)

References 4 publications

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“…Amorphous carbon films containing DLC films are synthesized by various methods such as chemical vapor deposition (CVD), which includes plasma-enhanced CVD [ 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 , 29 ], electron cyclotron resonance (ECR) plasma CVD [ 30 ], plasma-based ion implantation and deposition (PBII&D) [ 31 , 32 ], and physical vapor deposition, which includes ionized evaporation [ 33 ], sputtering [ 34 , 35 ], unbalanced magnetron sputtering (UBMS) [ 36 , 37 ], ECR sputtering [ 38 , 39 ], high-power impulse magnetron sputtering (HiPIMS) [ 40 , 41 ], filtered cathodic vacuum arc (FCVA) [ 42 , 43 , 44 , 45 ], ion-beam deposition (IBD) [ 5 , 46 , 47 , 48 ], arc ion plating (AIP) [ 49 , 50 ], pulsed laser deposition (PLD) [ 51 ], and laser arc deposition [ 52 , 53 ]. Many of the DLC films produced by these methods have deviated from the DLC regions on the ternary diagrams reported to date.…”

Section: Introductionmentioning

confidence: 99%

Properties and Classification of Diamond-Like Carbon Films

Hiratsuka²,

et al. 2021

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Diamond-like carbon (DLC) films have been extensively applied in industries owing to their excellent characteristics such as high hardness. In particular, there is a growing demand for their use as protective films for mechanical parts owing to their excellent wear resistance and low friction coefficient. DLC films have been deposited by various methods and many deviate from the DLC regions present in the ternary diagrams proposed for sp3 covalent carbon, sp2 covalent carbon, and hydrogen. Consequently, redefining the DLC region on ternary diagrams using DLC coatings for mechanical and electrical components is urgently required. Therefore, we investigate the sp3 ratio, hydrogen content, and other properties of 74 types of amorphous carbon films and present the classification of amorphous carbon films, including DLC. We measured the sp3 ratios and hydrogen content using near-edge X-ray absorption fine structure and Rutherford backscattering-elastic recoil detection analysis under unified conditions. Amorphous carbon films were widely found with nonuniform distribution. The number of carbon atoms in the sp3 covalent carbon without bonding with hydrogen and the logarithm of the hydrogen content were inversely proportional. Further, we elucidated the DLC regions on the ternary diagram, classified the amorphous carbon films, and summarized the characteristics and applications of each type of DLC.

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Section: Introductionmentioning

confidence: 99%

Properties and Classification of Diamond-Like Carbon Films

Hiratsuka²,

et al. 2021

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“…Hydrogen‐free DLC or tetrahedral amorphous carbon (ta‐C)10–12 films have attracted considerable interest due to their favorable properties such as superior mechanical properties and chemical resistance compared to a‐C:H films. Moreover, ta‐C films doped with nitrogen are expected to be excellent candidates for use as biocompatibility coatings on biomedical implants due to not only their excellent properties but also their chemical composition containing only carbon and nitrogen, which are biologically compatible.…”

Section: Introductionmentioning

confidence: 99%

Hemocompatibility of nitrogen‐doped, hydrogen‐free diamond‐like carbon prepared by nitrogen plasma immersion ion implantation–deposition

Kwok

Yang

Wang

et al. 2004

J Biomedical Materials Res

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Amorphous hydrogenated carbon (a-C:H) has been shown to be a potential material in biomedical devices such as artificial heart valves, bone implants, and so on because of its chemical inertness, low coefficient of friction, high wear resistance, and good biocompatibility. However, the biomedical characteristics such as blood compatibility of doped hydrogen-free diamond-like carbon (DLC) have not been investigated in details. We recently began to investigate the potential use of nitrogen-doped, hydrogen-free DLC in artificial heart valves. In our experiments, a series of hydrogen-free DLC films doped with nitrogen were synthesized by plasma immersion ion implantation-deposition (PIII-D) utilizing a pulsed vacuum arc plasma source and different N to Ar (FN/FAr) gas mixtures in the plasma chamber. The structures and properties of the film were evaluated by Raman spectroscopy, Rutherford backscattering spectrometry (RBS), and X-ray photoelectron spectroscopy (XPS). To assess the blood compatibility of the films and the impact on the blood compatibility by the presence of nitrogen, platelet adhesion tests were conducted. Our results indicate that the blood compatibility of both hydrogen-free carbon films (a-C) and amorphous carbon nitride films are better than that of low-temperature isotropic pyrolytic carbon (LTIC). The experimental results are consistent with the relative theory of interfacial energy and surface tension including both dispersion and polar components. Our results also indicate that an optimal fraction of sp2 bonding is desirable, but an excessively high nitrogen concentration degrades the properties to an extent that the biocompatibility can be worse than that of LTIC.

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“…Inaba et al have attempted to use a thick ring-type electrical filter between the double-bend filter duct and the process chamber, namely, in the path of plasma transportation to the substrate [13][14][15].…”

Section: Methodsmentioning

confidence: 99%

T-shape filtered arc deposition system with built-in electrostatic macro-particle trap for DLC film preparation

et al. 2009

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The T-shape filtered arc deposition system (T-FAD) is a powerful tool to prepare high-quality diamond-like carbon (DLC) films. Most macro-particles (droplets) emitted from the graphite cathode are caught at the extension duct of the droplet catcher or collector facing the cathode, and then the clean plasma bent 90 degrees is transported toward the substrate. However, further droplet reduction is still required in order to realize a higher quality film without droplet adhesion. In the present study, T-FAD was evolved by employing an electrostatic droplet trap (ES-trap). A cylindrical ES-trap was placed in the extension duct part of the T-shape duct of an electromagnetic plasma transportation and droplet filter. The ion current at the exit of the T-filter duct and the current flowing to the ES-trap were measured as a function of the ES-trap bias voltage for various positions of the ES-trap. The deposition rate and number of droplets were also measured. As a result, it was found that the optimum voltage of the ES-trap was +35 V and that it was better to place the ES-trap closer to the plasma beam in order to obtain fewer droplets on the film without an excessive decrease in the deposition rate. In the optimum condition, the number of droplets on the DLC film prepared with ES-trap was reduced to 1/3 of that without the ES-trap.

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Properties of Diamond-Like Carbon Films Fabricated by the Filtered Cathodic Vacuum Arc Method

Cited by 10 publications

References 4 publications

Properties and Classification of Diamond-Like Carbon Films

Properties and Classification of Diamond-Like Carbon Films

Hemocompatibility of nitrogen‐doped, hydrogen‐free diamond‐like carbon prepared by nitrogen plasma immersion ion implantation–deposition

T-shape filtered arc deposition system with built-in electrostatic macro-particle trap for DLC film preparation

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