Properties of copper-scandium oxide thin films prepared by pulsed laser deposition

Kakehi, Yoshiharu; Nakao, Satoru; Satoh, Kazuo; Yotsuya, Tsutomu

doi:10.1016/s0040-6090(03)01174-x

Cited by 26 publications

(19 citation statements)

References 12 publications

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“…9 was 3.7 eV. This value is almost consistent with the ones obtained in previous reports [7,[14][15][16].…”

Section: Fabrication Of Cso(0 0 0 1) Epitaxial Filmssupporting

confidence: 92%

“…CSO thin films were deposited by a PLD apparatus with an oxygen radical source (ULVAC: MB95-5005) using a Cu 2 Sc 2 O 5 pellet as a target [14][15][16]. A KrF excimer laser beam (l=248 nm, pulse duration=30 ns) was used for the ablation.…”

Section: Methodsmentioning

confidence: 99%

“…We reported on the epitaxial growth of CSO[3R] thin films with a 50-nm thickness prepared at relatively low deposition rates by a pulsed laser deposition (PLD) method [14,15]. However, it was possible to easily grow grains with different orientations and other phases in CSO thin films by increasing the film thickness using a long deposition time or a high laser repetition frequency [16].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Optical and electrical properties of CuScO2 epitaxial films prepared by combining two-step deposition and post-annealing techniques

Kakehi¹,

Satoh²,

Yotsuya³

et al. 2009

Journal of Crystal Growth

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“…9 was 3.7 eV. This value is almost consistent with the ones obtained in previous reports [7,[14][15][16].…”

Section: Fabrication Of Cso(0 0 0 1) Epitaxial Filmssupporting

confidence: 92%

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Optical and electrical properties of CuScO2 epitaxial films prepared by combining two-step deposition and post-annealing techniques

Kakehi¹,

Satoh²,

Yotsuya³

et al. 2009

Journal of Crystal Growth

Self Cite

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“…The size of the M may determine the non-doped conductivity of these materials, as the larger the M ion, the more oxygen interstitials the material can contain [17,20]. This is consistent with the reported undoped conductivity of CuYO 2 [20] being higher than CuScO 2 [39]. It cannot, however, explain why CuCrO 2 has a higher undoped conductivity even than CuAlO 2 [38].…”

Section: Introductionsupporting

confidence: 66%

Chemical bonding in copper-based transparent conducting oxides: CuMO₂(M = In, Ga, Sc)

Godinho

Morgan

Allen

et al. 2011

J. Phys.: Condens. Matter

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The geometry and electronic structure of copper-based p-type delafossite transparent conducting oxides, CuMO 2 (M = In, Ga, Sc), are studied using the generalized gradient approximation (GGA) corrected for on-site Coulomb interactions (GGA + U ). The bonding and valence band compositions of these materials are investigated, and the origins of changes in the valence band features between group 3 and group 13 cations are discussed. Analysis of the effective masses at the valence and conduction band edge explains the experimentally reported conductivity trends.

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“…Although a bit costly, but highly phase pure films with high-accuracy thickness can be prepared by this method. Delafossite p-TCO films prepared by this method include CuAlO 2 [100,116,[137][138][139] [140][141][142], etc. The deposition environment for most of the aforementioned reports was oxygen whereas the films were grown with an elevated substrate temperature.…”

Section: Other Deposition Techniques: Pld Rf Sputter Deposition Magmentioning

confidence: 99%

Reactive SputteredWide-Bandgap p-Type Semiconducting Spinel AB2O4 and Delafossite ABO2 Thin Films for “Transparent Electronics”

Banerjee¹,

Chattopadhyay

2008

Reactive Sputter Deposition

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Reactive sputtering is one of the most widely used techniques for preparing compound thin films (such as oxides, nitrides, carbides, etc.) by sputtering metal targets in an active gas atmosphere (Ar + O 2 /N 2 /CH 4 , etc.) [1][2][3][4]. In this chapter, we have discussed, in details, the formation of spinel and delafossite materials of the form AB 2 O 4 and ABO 2 (A and B may be monovalent, divalent, trivalent, or tetravalent cations, depending on the crystal structure, described later) by reactive sputtering technique. Specially, wide bandgap, ptype semiconducting, and transparent oxide materials with delafossite and spinel structure, having interesting applications in "Transparent Electronics," have been discussed in details. In Sects. 12.2-12.5, a detailed review on the structural, optical, and electrical properties of these p-type transparent conducting oxides (p-TCOs), deposited by reactive sputtering technique, has been presented and the origin of p-type conductivity of these materials has been discussed with considerable attention. Most of the results presented in these sections are reported by various authors working on this field. In Sect. 12.6, synthesis and electro-optical characterization of one of the very important delafossite, p-type semiconducting, and wide-bandgap material, such as CuAlO 2 , produced by our group via reactive sputtering technique, have been discussed in details. Detailed discussions on spinel-and delafossitestructured material can be found in various literatures [5][6][7][8][9][10][11][12][13][14]. Also, detailed reviews on the p-TCO materials have been published by us and others [15][16][17], which cover the syntheses and properties of a range of p-TCO materials reported so far.

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Properties of copper-scandium oxide thin films prepared by pulsed laser deposition

Cited by 26 publications

References 12 publications

Optical and electrical properties of CuScO2 epitaxial films prepared by combining two-step deposition and post-annealing techniques

Optical and electrical properties of CuScO2 epitaxial films prepared by combining two-step deposition and post-annealing techniques

Chemical bonding in copper-based transparent conducting oxides: CuMO₂(M = In, Ga, Sc)

Reactive SputteredWide-Bandgap p-Type Semiconducting Spinel AB2O4 and Delafossite ABO2 Thin Films for “Transparent Electronics”

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Properties of copper-scandium oxide thin films prepared by pulsed laser deposition

Cited by 26 publications

References 12 publications

Optical and electrical properties of CuScO2 epitaxial films prepared by combining two-step deposition and post-annealing techniques

Optical and electrical properties of CuScO2 epitaxial films prepared by combining two-step deposition and post-annealing techniques

Chemical bonding in copper-based transparent conducting oxides: CuMO2(M = In, Ga, Sc)

Reactive SputteredWide-Bandgap p-Type Semiconducting Spinel AB2O4 and Delafossite ABO2 Thin Films for “Transparent Electronics”

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Product

Resources

About

Chemical bonding in copper-based transparent conducting oxides: CuMO₂(M = In, Ga, Sc)