1992
DOI: 10.1016/0040-6090(92)90140-7
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Properties of CeO2 and CeO2−x films Part II. High temperature properties

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Cited by 41 publications
(14 citation statements)
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“…6. It is known that oxygen vacancies in CeO 2 contribute to the increase in their lattice constant [9] because of the mutual repulsion of Ce cations near oxygen vacancies. The experimental result in Fig.…”
Section: Discussionmentioning
confidence: 99%
“…6. It is known that oxygen vacancies in CeO 2 contribute to the increase in their lattice constant [9] because of the mutual repulsion of Ce cations near oxygen vacancies. The experimental result in Fig.…”
Section: Discussionmentioning
confidence: 99%
“…Thin films of CeO 2 are of interest for various electronic and optical applications, such as silicon-on-insulator structures, miniaturized stable capacitors, oxygen sensors, buffer layers for high-temperature superconductor films, and optical coatings [1][2][3][4][5][6][7]. CeO 2 is an ionic metal oxide with a high melting point (2600°C) having remarkable chemical stability and electrical insulation.…”
Section: Introductionmentioning
confidence: 99%
“…CeO 2 is a potential candidate for use in various technologies due to its insulating properties, [1] remarkable chemical stability, [2,3] and its interesting optical properties. [4] In addition, the large dielectric constant renders this material of potential use for application in smalldimension, stable, storage capacitors in dynamic random access memory (DRAM) devices.…”
Section: Introductionmentioning
confidence: 99%
“…There are two categories of cerium b-diketonate precursors, with the cerium ion in either 3+ or 4+ oxidation states. The precursors initially proposed were the tetrakis(2,2,6,6-tetramethyl-3,5-heptanedionato)cerium(IV) (Ce(tmhd) 4 ), tetrakis (6,6,7,7,8,8,8-heptafluoro-2,2-dimethyl-3,5-octanedionato)cerium(IV) (Ce(fod) 4 ), or Ce(fod) 3 . Among them, Ce(tmhd) 4 has been widely studied, even though it suffers drawbacks such as thermal decomposition and surface passivation.…”
Section: Introductionmentioning
confidence: 99%
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