Microelectronic Materials and Processes 1989
DOI: 10.1007/978-94-009-0917-5_7
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Properties and Applications of Silicides

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Cited by 6 publications
(4 citation statements)
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“…Recent achievements in microelectronics and other high technologies demonstrate a growing necessity in improving and further developing copper applications [37]. One of the most pressing issues is an increasing demand for epitaxially grown Cu films on non-conducting substrates and fabrication of smooth copper films, to serve as a growth template for device structures, such as tunnelling magneto-resistance devices [38].…”
Section: Discussionmentioning
confidence: 99%
“…Recent achievements in microelectronics and other high technologies demonstrate a growing necessity in improving and further developing copper applications [37]. One of the most pressing issues is an increasing demand for epitaxially grown Cu films on non-conducting substrates and fabrication of smooth copper films, to serve as a growth template for device structures, such as tunnelling magneto-resistance devices [38].…”
Section: Discussionmentioning
confidence: 99%
“…To form a reliable mechanical contact of Pd with the substrate the sample was thermally annealed in vacuum at a temperature of 350 • C for 10 min. According to [7], such a process results in the diffusion of the metal into the silicon and the formation of Pd 2 Si at the metal/silicon interface. To remove the anodic oxide mask the samples were immersed in a 200 g l −1 water solution of CrO 3 .…”
Section: Methodsmentioning
confidence: 99%
“…In response to the thermodynamical variables, transition metal monosilicides have been subjected to significant research for the purpose of determining their unique thermoelectric capabilities, superconductivity, structural phase transitions as well as their resistance to oxidation [1][2][3][4][5][6][7][8][9][10]. In particular, researchers have done in-depth investigations on the high-pressure transformations of transition metal monosilicides.…”
Section: Introductionmentioning
confidence: 99%