The coupling and transmission of transverse and longitudinal fields into apertureless microfabricated near-field optical probes is investigated. Two kinds of probes with different metal coating roughness are considered. Transverse and longitudinal field distributions are obtained by focusing azimuthally and radially polarized beams produced by means of a liquid crystal plate. The focal plane is scanned using microfabricated probes in a collection mode configuration. It is found that the roughness of the metal coating plays an important role in the coupling strength of transverse fields into the probes: the relative coupling efficiency for transverse fields diminishes with a rough metal coating, while that of longitudinal fields does not.Near-field scanning systems can map optical fields by locally probing small regions of space with suitable nanoprobes. Two of the most well-established scanning near-field optical microscopy (SNOM) techniques make use of probes consisting of metal-coated tapered fibers (or tapered glass capillaries) used as light collectors 1 or metal (or silicon) tips used as light scatterers.2 In mesoscopic optics, the electromagnetic field must be considered in its full vectorial nature and, in order to experimentally obtain complete information on the field amplitude, all three orthogonal components of the electric field vector must be accessible at each step of the scan. Therefore it is necessary to understand the interaction of the probe with not only the transverse components of the field, but also the component oriented longitudinally with respect to the tip axis.In several experiments it has been found that the probe characteristics in imaging transverse and longitudinal fields differ. For example, in the work of Bouhelier et al., 3 the behavior of metallic and dielectric probes in a scattering experiment is presented. It was found that gold tips are more likely to scatter longitudinally polarized fields, while uncoated glass probes are more sensitive to transversely polarized fields. With the advent of micro-machining technology, it has become possible to develop new batch fabrication processes for cantilever-based apertureless SNOM probes. 4,5