Programmable optical microshutter arrays for large aspect ratio microslits

Ilias, S.; Picard, Francis; Larouche, Carl; Kruzelecky, Roman V.; Jamroz, Wes; Noc, Loïc Le; Topart, P.

doi:10.1117/12.807187

Cited by 5 publications

(6 citation statements)

References 3 publications

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“…Likewise, metal-based but in the relaxed state nonplanar (i.e., curled/rolled), in contrast, are optical MEMS that are usually called shutter arrays [12][13][14][15][16][17] or microblinds. 18 Shutter-array-based MOEMS have been reported for transmission modulated smart glass, 12,18 space instrumentation, 13 camera shutters, 15 and displays. 16,19 These MOEMS shutter arrays are curled in the open state and unrolled by electrostatic actuation to obtain the flat closed condition.…”

Section: Introductionmentioning

confidence: 99%

MOEMS micromirror arrays in smart windows for daylight steering

Hillmer

Iskhandar

Hasan

et al. 2021

J. Optical Microsystems

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Micro-opto-electro-mechanical systems (MOEMS) micromirror and shutter arrays have gained huge interest in research and applications. Our study starts with an overview on the technological achievements and experimental results of groups that have been working on this field. The main part of our study is revealing the MOEMS micromirror array technology for light steering via smart glazing for buildings. The mirror array is actuated electrostatically and integrated between the panes of insulation glazing. Depending on user activity as well as daytime and season requirements, the MOEMS micromirror arrays shall enable personalized light steering, energy saving, and reduction of CO 2 emission. Technological fabrication of subfield addressing up to 64 fields inside the arrays is presented. Experimental characterization results such as actuation voltages, maximum and minimum transmission, contrast, and energy saving potential are reported. Using an industrial window module fabrication process, a laboratory demonstrator and a function demonstrator have been implemented. Rapid aging tests including vibrations, extreme temperatures, multiple temperature cycles, and long-term electrostatic actuation of micromirror structure were performed to evaluate reliability and lifetime. These results validate extrapolated lifetimes-in future applications as active windows-far beyond 40 years, as well as their robustness during transportation, installation, and against all vibration influences in buildings. © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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Section: Introductionmentioning

confidence: 99%

MOEMS micromirror arrays in smart windows for daylight steering

Hillmer

Iskhandar

Hasan

et al. 2021

J. Optical Microsystems

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“…In contrast to the planarized metallic MEMS micromirror arrays presented in Section 4.1, metallic MEMS structures that are curled (rolled, i.e., non-planar) in their relaxed state, in contrast, are called microshutter arrays [35][36][37][38][39] or micro blinds [40]. Transmission modulation has been reported for these MEMS microshutter arrays for applications in smart glass [35,41], space instrumentation [36], camera shutters [38], and displays [39,41]. These MEMS microshutter arrays are curled in the open state (first state) and unrolled in the closed state by electrostatic actuation to reveal the flat condition (second state).…”

Section: Mems Microshutter Arrays For Laser Safety Gogglesmentioning

confidence: 99%

State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications

Liu,

Kästner,

Donatiello

et al. 2024

Photonics

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This work provides an overview on micromirror arrays based on different material systems such as dielectrics, element silicon, compound semiconductors, metals, and novel 2D materials. The goal is to work out the particular strength of each material system to enable optimum performance for various applications. In particular, this review is intended to draw attention to the fact that MEMS micro-mirrors can be successful in many other material systems besides silicon. In particular, the review is intended to draw attention to two material systems that have so far been used less for MEMS micromirror arrays, that have been less researched, and of which fewer applications have been reported to date: metallic heterostructures and 2D materials. However, the main focus is on metallic MEMS micromirror arrays on glass substrates for applications like personalized light steering in buildings via active windows, energy management, active laser safety goggles, interference microscopy, and endoscopy. Finally, the different micromirror arrays are compared with respect to fabrication challenges, switching speed, number of mirrors, mirror dimensions, array sizes, miniaturization potential for individual mirrors, reliability, lifetime, and hinge methodology.

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“…The control of the stresses is crucial in order to get reproducible and uniform results (radius of curvature, actuation voltage, etc.) Many groups 17,26,31 have used magnetron sputtering to deposit the top electrode to tune the intrinsic stresses. University of Tokyo 27 has used evaporation techniques, relying on material dependent stresses.…”

Section: Fabrication Stepsmentioning

confidence: 99%

“…INO developed microshutters for spectrometry applications. 26 They are not aimed for large areas but mainly to cover slits in front of spectrometers. Each individual microshutter has a length of 1 mm and a width of 60 μm [Fig.…”

Section: Institut National D'optique Canadamentioning

confidence: 99%

“…Microblinds were also compared with other switchable glass technologies in review papers 14,15 and market reports. [19][20][21] Several groups have worked on various versions of microshutters, namely NRC, 17 New Visual Media Group (NVMG), 22,23 University of Kassel, 24,25 Institut National d'Optique (INO), 26 University of Tokyo, 27 Samsung, 28 U.S. Air Force (USAF), 29 Korea Advanced Institute of Science and Technology (KAIST), 30,31 Microelectronic Center of North Carolina (MCNC), 32 Fiat, 33,34 and University of Stuttgart. 35 These groups used various versions of curling electrodes actuated by electrostatic forces for switchable glass applications (window, display, imaging, eyewear, etc.).…”

Section: Introductionmentioning

confidence: 99%

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Review of microshutters for switchable glass

Lamontagne

Fong

Song

et al. 2019

J. Micro/Nanolith. MEMS MOEMS

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Background: Switchable glasses allow the control of light transmission-an attractive property for applications such as car sunroofs, aircraft windows, building windows, augmented reality, imaging, and displays. Commercialized switchable glasses have severe limitations, such as speed, cost, and operating conditions, among others. Microshutters, a type of switchable glass with very distinctive properties, are reviewed, as they are a technology that could significantly improve some or all of the shortcomings mentioned above. Aim: We will summarize the various types of microshutters and tentatively identify various critical designs, fabrication schemes, and performance criteria by the many research groups implementing them and investigating their properties. Approach: We will describe the various approaches used to control light transmission through microelectromechanical systems. It will compare their performances and comment on fabrication and implementation challenges. Conclusions: Microshutters have performance levels that could make them good candidates for switchable glasses. Many research groups have investigated various approaches to fabricate microshutters and have shown that they can be implemented reliably on a small scale, with fast actuation, low power, and high contrast and are relatively easy to manufacture. Work is needed to demonstrate that they can be scaled-up and still be economical to produce.

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Programmable optical microshutter arrays for large aspect ratio microslits

Cited by 5 publications

References 3 publications

MOEMS micromirror arrays in smart windows for daylight steering

MOEMS micromirror arrays in smart windows for daylight steering

State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications

Review of microshutters for switchable glass

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