Production of seismic mass suspensions in silicon by electro-discharge machining

Reynaerts, Dominiek; Meeusen, Wim; Brussel, Hendrik Van; Reyntjens, Steve; Puers, Robert

doi:10.1088/0960-1317/9/2/325

Cited by 12 publications

(3 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…1. Warianty REDM: a) powierzchnią boczną elektrody, b) końcem elektrody [4] W doborze warunków kształtowania REDM należy uwzględnić wpływ zużycia elektrody roboczej na kształt powierzchni po obróbce. Dla analizy procesu kształtowania REDM opracowano model matematyczny REDM oraz na jego bazie przygotowano oprogramowanie komputerowe [1].…”

Section: A) B)unclassified

Analysis of REDM process

Gulbinowicz¹

2015

Mechanik

View full text Add to dashboard Cite

Section: A) B)unclassified

Analysis of REDM process

Gulbinowicz¹

2015

Mechanik

View full text Add to dashboard Cite

“…To illustrate the compatibility of the micro-EDM technology with photolithography, a silicon uni-axial inclination sensor is designed and fabricated using the hybrid technology [7], [8]. The aim of this work is to set up a hybrid technology that inherits the particular benefits of both micro-EDM and photolithography.…”

Section: Uni-axial Inclination Sensormentioning

confidence: 99%

Micro-electro-discharge machining as microsensor fabrication technology

et al. 2003

View full text Add to dashboard Cite

This paper presents the design and fabrication of three miniaturized mechanical sensors to demonstrate the three-dimensional machining capabilities of micro-electro-discharge machining (EDM). The first sensor is an inertial bi-axial inclination sensor. The displacement of an inertial mass is measured optically by means of a two-dimensional position sensitive device (PSD). The machining freedom of micro-EDM makes it possible to produce both sensor and housing in one monolithic structure. The second sensor is an inertial uni-axial inclination sensor, which demonstrates the compatibility of the micro-EDM technology with the conventional photolithographic micromachining technologies. The mechanical structure of the sensor is machined by micro-EDM and the capacitive sensing part is produced by lithography. The aim of the integration is to set up a hybrid technology, which inherits the benefits of both micro-EDM and photolithography. The third miniaturized sensor is a three-component force sensor. The mechanical structure of the force sensor converts forces into displacements, which are measured optically. The mechanical structure of the force sensor is produced by wire-EDM and micro-EDM.Index Terms-Force sensor, inclination sensor, micro-electrodischarge machining (EDM).

show abstract

“…In previous work, micro-electro-discharge machining (micro-EDM) has already been introduced as a promising technique for manufacturing three-dimensional or highaspect-ratio silicon microstructures [1,2].…”

Section: Introductionmentioning

confidence: 99%

Integrating electro-discharge machining and photolithography: work in progress

Reynaerts¹,

Meeusen²,

Song³

et al. 2000

J. Micromech. Microeng.

View full text Add to dashboard Cite

This paper presents work in progress on the integration of micro-electro-discharge machining and photolithography. It is the aim to combine these two technologies in one microsystem. The case study of an inclinometer is used to verify the possibilities of such an integration. First the inclinometer principle is briefly introduced. Also a technique to compare the mechanical performance to the calculated values is given. Then, the specific problems of manufacturing this device with electro-discharge machining and photolithography are discussed. The following aspects of inter-process compatibility are discussed: surface quality aspects, process compatibility, and inter-process alignment.

show abstract

Production of seismic mass suspensions in silicon by electro-discharge machining

Cited by 12 publications

References 7 publications

Analysis of REDM process

Analysis of REDM process

Micro-electro-discharge machining as microsensor fabrication technology

Integrating electro-discharge machining and photolithography: work in progress

Contact Info

Product

Resources

About