Micro-electro-discharge machining as microsensor fabrication technology

Abstract

This paper presents the design and fabrication of three miniaturized mechanical sensors to demonstrate the three-dimensional machining capabilities of micro-electro-discharge machining (EDM). The first sensor is an inertial bi-axial inclination sensor. The displacement of an inertial mass is measured optically by means of a two-dimensional position sensitive device (PSD). The machining freedom of micro-EDM makes it possible to produce both sensor and housing in one monolithic structure. The second sensor is an inertial uni-axial inclination sensor, which demonstrates the compatibility of the micro-EDM technology with the conventional photolithographic micromachining technologies. The mechanical structure of the sensor is machined by micro-EDM and the capacitive sensing part is produced by lithography. The aim of the integration is to set up a hybrid technology, which inherits the benefits of both micro-EDM and photolithography. The third miniaturized sensor is a three-component force sensor. The mechanical structure of the force sensor converts forces into displacements, which are measured optically. The mechanical structure of the force sensor is produced by wire-EDM and micro-EDM.Index Terms-Force sensor, inclination sensor, micro-electrodischarge machining (EDM).

Fluid flow modelling of a micro-valve

“…For the spider-spring, we focus on two different manufacturing techniques (Electro Discharge Machining [14,15] -EDM -and SU8 lithography [16,17]) implying two different materials. The EDM milling procedure was chosen as it was one of the few mechanical manufacturing possibilities to realize the interior cuttings.…”

Microelectrochemical Deposition

“…The more recent trends have shown that the drive has gone beyond the earlier challenge of precision and minuteness in dimension to a new level where components of the same precision and invisible dimensions are demanded to be machined on tough materials with lower cost. Semiconductor processing technologies such as photolithography on a silicon substrate are used for fabricating MEMS components (5,6). The material properties of silicon often do not meet the requirement of recent applications of these microparts because they require high-quality structure and capability to withstand high strength.…”

Net shape fabrication of stainless-steel micro machine components from metallic powder

“…Micro metallic machine components have important applications in the watch-making industry [2], instrumentation and medical devices [3] and the related fabrication technology has been widely studied. Micro-electro-discharge machining (micro EDM) is one of the fabrication techniques in which different types of miniature components are fabricated [4,5]. EDM is limited to the fabrication of conductive materials.…”