Proceedings of 2002 International Symposium on Micromechatronics and Human Science
DOI: 10.1109/mhs.2002.1058021
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Process observation for the assembly of hybrid micro systems

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Cited by 6 publications
(4 citation statements)
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“…In [14] Pfeifer et al describe the advantages of an inspection system along a micro-assembly line. Buschhaus et al present in [15] monitoring of a robotbased process for the metallization of three dimensional molded interconnected devices.…”
Section: Related Workmentioning
confidence: 99%
“…In [14] Pfeifer et al describe the advantages of an inspection system along a micro-assembly line. Buschhaus et al present in [15] monitoring of a robotbased process for the metallization of three dimensional molded interconnected devices.…”
Section: Related Workmentioning
confidence: 99%
“…Nevertheless it should be asserted that despite of the presented advantages 2D image processing applications are strictly limited to the measurement task. [2] 3 3D image acquisition by fiber-based fringe projection…”
Section: Process Observation and Process Controlmentioning
confidence: 99%
“…The result is a three dimensional cloud of points describing the surface of the micro part. [9] Fig. 7 shows the results of measuring a micro gearwheel.…”
Section: Acquiring Unitmentioning
confidence: 99%
“…The miniaturization of products coupled with development of new technologies [1,2] has enabled us to develop equipment and instruments of small dimensions [3,4]. Our aim is to create fully automated desktop microfactory.…”
Section: Introductionmentioning
confidence: 99%