Hybrid microsystems with optical and mechanical functions can be implemented economically only by an automated assembly. In order to guarantee a high quality of the products, the use of a flexible and simply manageable process control system is necessary. The Laser-Scanning-Microscopy, based on the confocal microscopy, is suitable due to the variable magnification and the threedimensionally visualisation ideally for the automated micro-assembly. The confocal Laser-Scanning-Microscope (CLSM) serves in fabrication and also in assembly apart from the process visualisation for the analyse for micro surface structures, the detection of defects or the measurement of threedimensional geometries of microparts.
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