At present, many areas of industry have strong tendencies towards miniaturization of products. Mechanical components of these products as a rule are manufactured using conventional large-scale equipment or micromechanical equipment based on microelectronic technology (MEMS). The first method has some drawbacks because conventional large-scale equipment consumes much energy, space and material. The second method seems to be more advanced but has some limitations, for example, two-dimensional (2D) or 2.5-dimensional shapes of components and materials compatible with silicon technology. In this paper, we consider an alternative technology of micromechanical device production. This technology is based on micromachine tools (MMT) and microassembly devices, which can be produced as sequential generations of microequipment. The first generation can be produced by conventional large-scale equipment. The machine tools of this generation can have overall sizes of 100–200 mm. Using microequipment of this generation, second generation microequipment having smaller overall sizes can be produced. This process can be repeated to produce generations of micromachine tools having overall sizes of some millimetres. In this paper we describe the efforts and some results of first generation microequipment prototyping. A micromachining centre having an overall size of 130 × 160 × 85 mm3 was produced and characterized. This centre has allowed us to manufacture micromechanical details having sizes from 50 µm to 5 mm. These details have complex three-dimensional shapes (for example, screw, gear, graduated shaft, conic details, etc), and are made from different materials, such as brass, steel, different plastics etc. We have started to investigate and to make prototypes of the assembly microdevices controlled by a computer vision system. In this paper we also describe an example of the applications (microfilters) for the proposed technology.
Microelectronics-based micromechanics is rather limited for the construction of 3D micromechanisms with moving parts. We propose to use microequipment to transfer the technologies of mechanical engineering to the microdomain. We show that equipment precision increases linearly with decreasing size. To make microequipment, we suggest a series of equipment generations with gradually decreasing dimensions. Miniaturization of equipment will reduce power consumption and floor area occupied. Coupled with automation, it will drastically reduce the cost of microequipment. This in its turn will reduce the cost of micromechanical devices manufactured by microequipment. Microequipment-based manufacturing will also increase throughput by the concurrent operation of large numbers of low-cost microequipment pieces. The low cost and high productivity of microequipment-based manufacturing will widen the range of feasible micromechanical applications, both single-unit and mass. We propose designs for microvalve fluid filters, capillary heat exchangers, electromagnetic and hydraulic step motors that could be easily implemented by micromechanical engineering technologies. Hybrid technologies combining massively parallel microequipment based manufacturing and batch manufacturing may also be promising.
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