Process analysis using RSM and simulation

Cecchetti, Matteo; Lissoni, Michele; Lombardi, C.; Marmiroli, A.

doi:10.1016/0167-9317(92)90486-b

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1999

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Cited by 11 publications

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“…The concept of desirability functions used in conjunction with experimental designs was described in 1965 by Harrington EC [2]. Coupling both concepts of numerical design of experiments and desirability functions to optimize a physical system was surprisingly used in very few papers essentially devoted to semiconductor technology [3][4][5][6][7][8][9][10][11].…”

Section: Introductionmentioning

confidence: 99%

Optimizing an electrochemical deposition process by use of design of computer experiments

Rabiot¹,

Caire²,

Nguyen³

et al. 1998

Analusis

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Abstract.A response surface methodology only based in this case on computer experiments was used in conjunction with the desirability concept to optimize a priori an electrodeposition process designed for production of gold-tin alloy bumps on a 4 inches wafer. The efficiency of the method was used to achieve at a cheap cost with a small number of computer experiments the technical specifications required in term of metal deposit thickness uniformity.

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