Optimizing an electrochemical deposition process by use of design of computer experiments

Abstract

Abstract.A response surface methodology only based in this case on computer experiments was used in conjunction with the desirability concept to optimize a priori an electrodeposition process designed for production of gold-tin alloy bumps on a 4 inches wafer. The efficiency of the method was used to achieve at a cheap cost with a small number of computer experiments the technical specifications required in term of metal deposit thickness uniformity.

Experimental Design and Response Surface Analysis as Available Tools for Statistical Modeling and Optimization of Electrodeposition Processes

“…In addition, these experiments are time consuming, requiring a large number of experiments, and also produce substantial amounts of wastewater. Moreover, the influence of the combined parameters on the studied variables is not evaluated, which confirms that the optimum levels determined by these methods are generally unreliable (San Martín et al, 1998;Rabiot et al, 1998;Santana et al, 2007a, Santana et al, 2007b. Therefore, to ensure greater reproducibility and quality, the development of a more scientific approach that leads to a better understanding of alloy deposition phenomena is important.…”

“…These methodologies both drastically reduce the number experiments needed to optimize the process and give statistical inference on the optimum deposition conditions (Rabiot et al, 1998). These methodologies also allow improvements in both process performance and reliability, thereby decreasing the cost and the volume of produced wastewater in addition to leading to the creation of new coatings systems that can fulfill industrial needs (Ferreira et al, 2007;Santana et al, 2007a).…”

Electrodeposition of Composite Coatings of Cu/AlO(OH) Using Allyl Alcohol as an Additive

“…One way to obtain a better approximation of the optimized conditions is the use of experimental design tools, such as the response surface methodology, where all parameters are varied simultaneously, showing the responses of their synergistic and\ or antagonistic interactions 31,34 . These methodologies sharply reduce the number of experiments required for optimization of the process, as well as decrease the cost and volume of effluent generated.…”

“…These methodologies sharply reduce the number of experiments required for optimization of the process, as well as decrease the cost and volume of effluent generated. They also provide the necessary statistical inference for a better process efficiency 34,35 . In addition, it is possible to create new coating systems that can fulfill different industrial needs 31,36,37 .…”

“…In addition, it is possible to create new coating systems that can fulfill different industrial needs 31,36,37 . Nowadays, several reports can be found in the literature concerning the use of these methodologies to enhance the quality of electrodeposition baths or to achieve realistic optimized conditions 30,[32][33][34][36][37][38][39][40][41] . The microstructure of the composite coatings depends on both the metallic matrix and the second phase material.…”