Probing the microporosity of low-k organosilica films: MP and t-plot methods applied to ellipsometric porosimetry data

Lépinay, Matthieu; Broussous, Lucile; Licitra, C.; Bertin, F.; Rouessac, V.; Ayral, A.; Coasne, Benoît

doi:10.1016/j.micromeso.2015.05.050

Cited by 12 publications

(6 citation statements)

References 20 publications

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“…We also observed this specific behavior of toluene for EP experiments performed on microporous organosilica thin films prepared by plasma enhanced vapor deposition …”

Section: Hierarchically Porous Organosilica Membranessupporting

confidence: 57%

Sol‐Gel Synthesis and Fine Characterization of Hierarchically Porous and Multifunctional Silica‐Based Membranes

Ayral

2018

The Chemical Record

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Rational design of thin films for improving their functional properties can result in complex architectures. This issue will be here illustrated in the case of sol-gel derived hierarchically porous and multifunctional silica-based membranes. Thin silica layers with isolated and randomly distributed macropores, isolated and ordered mesopores and an interconnected microporosity in the silica walls are thus obtained by combining different synthesis strategies. The impact of the overall porosity and of the pore size distribution on the mechanical properties of these layers is investigated coupling experimental measurements and numerical simulation. The extra porosity is used for providing a catalytic functionality by inserting Pt nanoparticles at predefined locations. Two methods are implemented to control the spatial distribution of the catalytic nanoparticles either in the mesopores or in the macropores. The catalytic performance of the resulting materials is tested. Organosilica thin films with isolated and ordered mesopores and an interconnected microporosity in the walls are also prepared and characterized in terms of adsorption and gas permeation. Numerical simulation of adsorption appears as a promising tool for understanding and predicting the properties of such films.

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“…We also observed this specific behavior of toluene for EP experiments performed on microporous organosilica thin films prepared by plasma enhanced vapor deposition …”

Section: Hierarchically Porous Organosilica Membranessupporting

confidence: 57%

Sol‐Gel Synthesis and Fine Characterization of Hierarchically Porous and Multifunctional Silica‐Based Membranes

Ayral

2018

The Chemical Record

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“…Ellipsometric porosimetry (EP) is a powerful technique for the evaluation of thin porous films. It is based on in-situ ellipsometry monitoring of the refractive index changes in the porous layer as a result of the adsorption/desorption of a probe molecule supplied at well-controlled partial pressures 51–53 . For a qualitative assessment of the resulting isotherms, one can avoid fitting the recorded Psi/Delta values by plotting the relative changes of these optical parameters as a function of adsorbate pressure (e.g., Delta at 633 nm) (Fig.…”

Section: Resultsmentioning

confidence: 99%

Vapor-deposited zeolitic imidazolate frameworks as gap-filling ultra-low-k dielectrics

et al. 2019

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The performance of modern chips is strongly related to the multi-layer interconnect structure that interfaces the semiconductor layer with the outside world. The resulting demand to continuously reduce the k-value of the dielectric in these interconnects creates multiple integration challenges and encourages the search for novel materials. Here we report a strategy for the integration of metal-organic frameworks (MOFs) as gap-filling low-k dielectrics in advanced on-chip interconnects. The method relies on the selective conversion of purpose-grown or native metal-oxide films on the metal interconnect lines into MOFs by exposure to organic linker vapor. The proposed strategy is validated for thin films of the zeolitic imidazolate frameworks ZIF-8 and ZIF-67, formed in 2-methylimidazole vapor from ALD ZnO and native CoO x , respectively. Both materials show a Young’s modulus and dielectric constant comparable to state-of-the-art porous organosilica dielectrics. Moreover, the fast nucleation and volume expansion accompanying the oxide-to-MOF conversion enable uniform growth and gap-filling of narrow trenches, as demonstrated for 45 nm half-pitch fork-fork capacitors.

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“…In this study, the Harkins–Jula standard t -curve (eq ) was used as the standard isotherm . This curve is one of the commonly used t -curves for the MP method . Further details are described in the Experimental Procedure S1, Supporting Information.…”

Section: Methodsmentioning

confidence: 99%

Preparation of Monodispersed Nanoporous Eu(III)/Titania Loaded with Ibuprofen: Optimum Loading, Luminescence, and Sustained Release

et al. 2021

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Functional nanomaterials are one of the potential carriers for drug delivery, whereas there are many prerequisites for this purpose. The carrier should be monodispersed, be fluorescent, and have a proper nanostructure to keep/release drug molecules to achieve controlled release, although preparing a nanomaterial which fulfills all the demands is still very challenging. In this paper, we show the preparation of monodispersed nanoporous amorphous titania submicron particles with fluorescent property. They adsorb a model drug moleculeibuprofenwith their surface coverage up to 100%. Such a perfect loading does not decrease the fluorescent intensity because of any quenching effects but even maximize it. We also demonstrate the release behavior of IBU into simulated body fluid. Interestingly, the present carrier releases most of IBU in 6 h, whereas that modified with the polyethylene glycol moiety takes 48 h to finish releasing IBU, indicating its potential for controlled release applications.

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Probing the microporosity of low-k organosilica films: MP and t-plot methods applied to ellipsometric porosimetry data

Cited by 12 publications

References 20 publications

Sol‐Gel Synthesis and Fine Characterization of Hierarchically Porous and Multifunctional Silica‐Based Membranes

Sol‐Gel Synthesis and Fine Characterization of Hierarchically Porous and Multifunctional Silica‐Based Membranes

Vapor-deposited zeolitic imidazolate frameworks as gap-filling ultra-low-k dielectrics

Preparation of Monodispersed Nanoporous Eu(III)/Titania Loaded with Ibuprofen: Optimum Loading, Luminescence, and Sustained Release

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