Probe modification for scanning-probe microscopy by the focused ion beam method

Коноплев, Б. Г.; Агеев, О. А.; Smirnov, V. A.; Kolomiitsev, A. S.; Serbu, N. I.

doi:10.1134/s1063739712010052

Cited by 25 publications

(11 citation statements)

References 5 publications

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“…STS spectra were correlated with DRS reflectivity dependence on coverage. Tungsten tips were prepared by electrochemical etching in KOH with subsequent thinning by a dual-focused ion beam (FEI) to produce 7 nm tip radius (beam parameters: 1.5 nA, 30 keV) . STM images were processed using WSxM software .…”

Section: Experimental Methodsmentioning

confidence: 99%

“…Tungsten tips were prepared by electrochemical etching in KOH with subsequent thinning by a dual-focused ion beam (FEI) to produce 7 nm tip radius (beam parameters: 1.5 nA, 30 keV). 42 STM images were processed using WSxM software. 43 It should be mentioned that imaging was challenging at room temperature since regulation parameters for molecules and NPs are very different.…”

Section: ■ Experimental Methodsmentioning

confidence: 99%

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Ordered Hybrid Assembly of Palladium Nanoparticles and Perylene Molecules on an Alumina Template

et al. 2019

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Combining in a synergic way inorganic and organic matter at nanometre level has become a key research pathway for nanoelectronics, light harvesting, energy storage or sensing. Herein, we demonstrate the nanoscale ordering at room temperature of a two-dimensional hybrid assembly combining a long-range ordered array of Pd nanoparticles (NPs) with perylene molecules. The ordering, driven by the periodic superstructure of the Al2O3 ultrathin layer support, has been achieved for 0.9 nm diameter NPs and flat-lying molecules with a 2:1 perylene:NP relative ratio. At larger NP size and perylene coverage, molecules tilt up on alumina and adsorb on NPs. Combined near-field microscopy and optical spectroscopies provide a detailed understanding of the structural properties as a function of NP size and molecular coverage. This hybrid assembly opens the way to study at the molecular level the optical and electronic properties resulting from the coupling of organic molecules and nanoparticles using multi-scale surface sensitive techniques.

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Section: Experimental Methodsmentioning

confidence: 99%

Section: ■ Experimental Methodsmentioning

confidence: 99%

Ordered Hybrid Assembly of Palladium Nanoparticles and Perylene Molecules on an Alumina Template

et al. 2019

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“…In general, high aspect ratio tips can be fabricated with minimal tip radius of curvature. In the following list we provide some example references: (i) atomic force microscopy (AFM) [142,143], Scanning probes have also been modified for various lithography procedures such as for nanoindentation lithography [150] and for dip pen lithography [151].…”

Section: Proximal Probes Fib-based Modifications Of Probesmentioning

confidence: 99%

Direct-Write Ion Beam Lithography

Joshi‐Imre

Bauerdick

2014

Journal of Nanotechnology

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Patterning with a focused ion beam (FIB) is an extremely versatile fabrication process that can be used to create microscale and nanoscale designs on the surface of practically any solid sample material. Based on the type of ion-sample interaction utilized, FIB-based manufacturing can be both subtractive and additive, even in the same processing step. Indeed, the capability of easily creating three-dimensional patterns and shaping objects by milling and deposition is probably the most recognized feature of ion beam lithography (IBL) and micromachining. However, there exist several other techniques, such as ion implantation- and ion damage-based patterning and surface functionalization types of processes that have emerged as valuable additions to the nanofabrication toolkit and that are less widely known. While fabrication throughput, in general, is arguably low due to the serial nature of the direct-writing process, speed is not necessarily a problem in these IBL applications that work with small ion doses. Here we provide a comprehensive review of ion beam lithography in general and a practical guide to the individual IBL techniques developed to date. Special attention is given to applications in nanofabrication.

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“…The resolvability of an AFM microscope is determined by the radius of curvature and aspect ratio of the probe-tip sides [2][3][4][5][6]. Therefore, the development of methods for the fabrication of probes with parameters that make it possible to minimize distortions of the surface morphology of the sample surface in an AFM investigation is a topical issue.…”

Section: Introductionmentioning

confidence: 99%

“…Commercially available probes are fabricated from silicon by microelectronic methods, with the result that a pyramidal tip with a radius of 10-100 nm is formed on the cantilever [2]. Surfaces containing high-aspect structures are studied by the AFM technique with cantilevers which have probes whose tip is modified by the method of focused ion beams (FIB), with a probe-tip radius of about 9 nm [6][7][8]. A small radius of curvature and high aspect ratio between sides of the probe tip are obtained by modification with local electronbeam and ion-stimulated deposition methods [2,9].…”

Section: Introductionmentioning

confidence: 99%

Study of modification methods of probes for critical-dimension atomic-force microscopy by the deposition of carbon nanotubes

Агеев

Bykov²,

Kolomiitsev

et al. 2015

Semiconductors

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The results of an experimental study of the modification of probes for critical-dimension atomicforce microscopy (CD-AFM) by the deposition of carbon nanotubes (CNTs) to improve the accuracy with which the surface roughness of vertical walls is determined in submicrometer structures are presented. Methods of the deposition of an individual CNT onto the tip of an AFM probe via mechanical and electrostatic interaction between the probe and an array of vertically aligned carbon nanotubes (VACNTs) are studied. It is shown that, when the distance between the AFM tip and a VACNT array is 1 nm and the applied voltage is within the range 20-30 V, an individual carbon nanotube is deposited onto the tip. On the basis of the results obtained in the study, a probe with a carbon nanotube on its tip (CNT probe) with a radius of 7 nm and an aspect ratio of 1:15 is formed. Analysis of the CNT probe demonstrates that its use improves the resolution and accuracy of AFM measurements, compared with the commercial probe, and also makes it possible to determine the roughness of the vertical walls of high-aspect structures by CD-AFM. The results obtained can be used to develop technological processes for the fabrication and reconditioning of special AFM probes, including those for CD-AFM, and procedures for the interoperational express monitoring of technological process parameters in the manufacturing of elements for micro-and nanoelectronics and micro-and nanosystem engineering.

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Probe modification for scanning-probe microscopy by the focused ion beam method

Cited by 25 publications

References 5 publications

Ordered Hybrid Assembly of Palladium Nanoparticles and Perylene Molecules on an Alumina Template

Ordered Hybrid Assembly of Palladium Nanoparticles and Perylene Molecules on an Alumina Template

Direct-Write Ion Beam Lithography

Study of modification methods of probes for critical-dimension atomic-force microscopy by the deposition of carbon nanotubes

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