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A technique for determining Young's modulus of vertically aligned carbon nanotubes using the refined micromechanical model of the nanoindentation of a forest of vertically aligned carbon nanotubes is developed. The results of experimental studies of Young's modulus determination for vertically aligned car bon nanotubes with different geometrical parameters are given. It is shown that, for a forest of carbon nano tubes with an effective diameter of around 100 nm and an effective length of approximately 2 μm, as well as for a forest with an effective diameter of carbon nanotubes of roughly 52 nm and their effective length of nearly 500 nm, the values of Young's modulus are 1.68 ± 0.08 and 1.01 ± 0.05 TPa, respectively. Our results can be used for developing the technological processes of the formation of structures for nano and micro electronics and nano and microsystem technology on the basis of vertically aligned carbon nanotubes.

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The results of an experimental study of the modification of probes for critical-dimension atomicforce microscopy (CD-AFM) by the deposition of carbon nanotubes (CNTs) to improve the accuracy with which the surface roughness of vertical walls is determined in submicrometer structures are presented. Methods of the deposition of an individual CNT onto the tip of an AFM probe via mechanical and electrostatic interaction between the probe and an array of vertically aligned carbon nanotubes (VACNTs) are studied. It is shown that, when the distance between the AFM tip and a VACNT array is 1 nm and the applied voltage is within the range 20-30 V, an individual carbon nanotube is deposited onto the tip. On the basis of the results obtained in the study, a probe with a carbon nanotube on its tip (CNT probe) with a radius of 7 nm and an aspect ratio of 1:15 is formed. Analysis of the CNT probe demonstrates that its use improves the resolution and accuracy of AFM measurements, compared with the commercial probe, and also makes it possible to determine the roughness of the vertical walls of high-aspect structures by CD-AFM. The results obtained can be used to develop technological processes for the fabrication and reconditioning of special AFM probes, including those for CD-AFM, and procedures for the interoperational express monitoring of technological process parameters in the manufacturing of elements for micro-and nanoelectronics and micro-and nanosystem engineering.