Prevention of tapering in the tube-shaped sputtering target via initial heat treatment under external pressure

Lee, Jong-Rak; Chung, Tai‐Joo; Yang, Seung-Ho; Hong, G. P.; Oh, Kyoung-Hee

doi:10.1016/j.ceramint.2014.11.038

Cited by 6 publications

(3 citation statements)

References 15 publications

(30 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Given the importance of sputtering targets, the processes and properties of sputtering targets for TCO films have been extensively investigated, particularly those of AZO and gallium-doped zinc oxide (GZO) [20,21,[25][26][27][28][29][30][31][32][33][34][35][36][37]. Unfortunately, the process and characteristics of IGZO targets have been studied relatively little [3,4].…”

Section: Introductionmentioning

confidence: 99%

Preparation and sintering of indium–gallium–zinc oxide ceramics with different zinc oxide contents

Chang

Chaung

et al. 2015

Journal of the European Ceramic Society

View full text Add to dashboard Cite

Section: Introductionmentioning

confidence: 99%

Preparation and sintering of indium–gallium–zinc oxide ceramics with different zinc oxide contents

Chang

Chaung

et al. 2015

Journal of the European Ceramic Society

View full text Add to dashboard Cite

“…This black circular zirconia ceramic back cover was mainly produced and provided by Lansi Technology Co., Ltd. Subsequently, in 2016, Apple released the precision ceramic Apple watch Edition 2, which has a magnetic suction wireless charging base and a charging head of 5via [ 18 – 20 ]. In 2016, Huami technology, the manufacturer of Xiaomi watch, took the lead in launching the first all-ceramic bezel sports watch of Amazfit brand and the later Amazfit smart sports watches.…”

Section: Intelligent Terminal Ceramic and 5g Communication And Wirele...mentioning

confidence: 99%

Construction of a Ceramic Appearance Design System Based on Technology for Internet of Things

Long

Ouyang

2022

Computational Intelligence and Neuroscience

View full text Add to dashboard Cite

The planning and design of intelligent storage systems in ceramic parks based on the industrial Internet of Things technology are proposed. Based on the analysis of the storage demand of ceramic parks, information transformation is carried out according to the original manual operation mode. The RFID technology is applied to the overall planning of the warehouse area and the deployment of the software; it is applied to the overall planning of the RFID system, the hardware deployment of the two-dimensional warehouse system, and the integration of the RFID technology and the software deployment of the two-dimensional warehouse system. It realizes the close cooperation between the information system and hardware equipment, optimizes the system process, and improves the level of warehouse management.In addition, smart terminal ceramics refer to those with fine ceramic appearances or functionalities in smart terminal products, such as smartphones, smart watches, and other wearable devices, in the field of consumer electronics, including ceramic back plates, middle frames, buttons, fingerprint recognition sheets on mobile phones and ceramic cases, bracelets, and back covers on smart watches. Aside the excellent performance and aesthetic properties of ceramic materials, they can also be adapted to the trends in 5G and wireless communication technology. From the perspective of high strength, high toughness, and colorful nano-zirconia ceramics, this article was aimed to review the development process and industrialization application process.

show abstract

“…In turn, Lee J.-R. et al showed that the use of a UHP procedure at the stage of forming cylindrical segments for ZnO-based tube targets can significantly reduce a tapering phenomenon along the formed cylinder characteristic of pressure-free sintering. [11]. It is also important to note that the use of rigid and rugged press-forms in the one stage UHP and SPS techniques also ensures the formation of a sintered ceramic body with dimensions very close to the required final dimensions, which minimizes subsequent machining processes.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Segments for ZnO-Based Tube Ceramic Targets by the Spark Plasma Sintering Method

et al. 2023

View full text Add to dashboard Cite

In this article, problems associated with the fabrication of ZnO-based ceramics in the form of large-diameter hollow cylinders with a large ratio of height h to wall thickness ∆r (h/∆r ≥ 3) by the spark plasma sintering (SPS) method were studied. The design of the press-form is proposed, which ensures the reduction in temperature gradients along the inner and outer surfaces of the hollow cylindrical sintered body and, as a result, the achievement of a high-density uniformity of the sintered body over its volume. A hollow cylindrical ZnO-based ceramic sample considered as segments of TCO tube targets with outer diameter D = 72 mm, inner diameter d = 47 mm, and height h = 36 mm were fabricated. The sample had a relative density of more than 98.5% of the theoretical density for a given composition with a minimal density inhomogeneity along the height of the sample. The microstructure of the obtained ceramics was studied using the SEM and XRD methods.

show abstract

Prevention of tapering in the tube-shaped sputtering target via initial heat treatment under external pressure

Cited by 6 publications

References 15 publications

Preparation and sintering of indium–gallium–zinc oxide ceramics with different zinc oxide contents

Preparation and sintering of indium–gallium–zinc oxide ceramics with different zinc oxide contents

Construction of a Ceramic Appearance Design System Based on Technology for Internet of Things

Fabrication of Segments for ZnO-Based Tube Ceramic Targets by the Spark Plasma Sintering Method

Contact Info

Product

Resources

About