In this paper we present a study of the formation of TiN thin films during the IBAD
process. We have analyzed the effects of process parameters such as Ar+ ion energy, ion incident
angle, Ti evaporation rates and partial pressure of N2 on preferred orientation and resistivity of TiN
layers. TiN thin films were grown by evaporation of Ti in the presence of N2 and simultaneously
bombarded with Ar+ ions. Base pressure in the IBAD chamber was 1⋅10-6 mbar. The partial pressure
of Ar during deposition was (3.1 – 6.6)⋅10-6 mbar and partial pressure of N2 was 6.0⋅10-6 -
1.1⋅10-5 mbar. The substrates used were Si (100) wafers. TiN thin layers were deposited to a
thickness of 85 – 360 nm at deposition rates of Ti from 0.05 to 0.25nm/s. Argon ion energy was
varied from 1.5 to 2.0 keV and the angle of ion beam incidence from 0 to 30o. All samples were
analyzed by Rutherford backscattering spectrometry (RBS). The changes in concentration profiles
of titanium, nitrogen and silicon were determined with 900 keV He++ ion beam. The RBS spectra
were analyzed with the demo version of WiNDF code. We have also used X-ray diffraction (XRD)
for phase identification. The resistivity of samples was measured with four-point probe method. The
results clearly show that TiN thin layer grows with (111) and (200) preferred orientation, depending
on the IBAD deposition parameters. Consequently, the formation of TiN thin layers with wellcontrolled
crystalline orientation occurs. Also, it was found that the variations in TiN film resistivity
could be mainly attributed to the ion beam induced damage during the IBAD process.