1991
DOI: 10.1016/0040-6090(91)90240-x
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The deposition and microstructure of broad beam, ion sputtered titanium nitride coatings

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Cited by 6 publications
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“…Titanium nitride can be doped with carbon in order to control the phase transition during the oxidative heating. Titanium nitride and the carbon-doped titanium nitride phase are easily prepared by the sputtering or arc ion plating of titanium under the appropriate reactive gas atmospheres [19,20].…”
Section: Introductionmentioning
confidence: 99%
“…Titanium nitride can be doped with carbon in order to control the phase transition during the oxidative heating. Titanium nitride and the carbon-doped titanium nitride phase are easily prepared by the sputtering or arc ion plating of titanium under the appropriate reactive gas atmospheres [19,20].…”
Section: Introductionmentioning
confidence: 99%