Preparation of SnO2 thin films at low temperatures with H2 gas by the hot-wire CVD method

Natsuhara, H.; Tatsuyama, T.; Ushiro, M.; Furuhashi, Masayuki; Fujii, Takashi; Ohashi, Fumitaka; Yoshida, Norimitsu; Nonomura, Shuichi

doi:10.1016/j.tsf.2011.01.309

Cited by 13 publications

(3 citation statements)

References 4 publications

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“…In order to investigate the effects of substrates position, three locations were used including 18 cm, 21 cm and 24 cm from the alumina boat (starting material). Chamber were heated by ramping with three different temperature levels from 300˚C, 600˚C and 1000˚C with argon (Ar) gas flow to eliminate the atmospheric gas [7]. Then, Oxygen (O 2 ) gas was supplied into the chamber when the temperature was achieving 1000˚C.…”

Section: Methodsmentioning

confidence: 99%

Uniform Deposition of Titanium Dioxide Films by Chemical Vapor Deposition (CVD)

Rahim

Sahdan

Lias

2015

AMM

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Titanium is a lightweight metal with an outstanding combination of properties which make it the material of choice for many different applications. This paper investigates the structure, surface characteristics and electrical properties of the Titanium Dioxide (TiO2) thin ﬁlm, deposited by chemical vapor deposition (CVD). The deposition temperature was 1000°C with 3 different positions of the glass substrates. The surface morphologies were examined using a field emission scanning electron microscope (FESEM) and an atomic force microscopy (AFM). In order to investigate the structural properties, the TiO2thickness was measured using a surface profiler. The optical properties of TiO2were measured using an ultraviolet visible spectroscopy (UV-Vis). The surface morphology was found to be sensitive to the deposition parameters and the growth TiO2is more uniform when the position of substrate is closed to the starting material.

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Section: Methodsmentioning

confidence: 99%

Uniform Deposition of Titanium Dioxide Films by Chemical Vapor Deposition (CVD)

Rahim

Sahdan

Lias

2015

AMM

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“…On the other hand, they generate films with higher electric instabilities. Among the humid routes, most used are as follows: chemical vapor deposition (CVD) [28,29], sol-gel spin-coating/dip-coating [30,31] and spray pyrolysis [32,33]. Dry or physical routes are also used, such as sputtering [34], electron beam [35] and pulsed laser deposition (PLD) [36].…”

Section: Introductionmentioning

confidence: 99%

Improved electrical transport in lightly Er-doped sol–gel spin-coating SnO2 thin films, processed by photolithography

2014

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Sol-gel spin-coating SnO 2 thin films were deposited and processed through positive photolithography (liftoff), avoiding surface interaction with gaseous oxygen species and leading to samples with higher stability and data reproducibility, when submitted to electrical characterization. Processing includes: (1) a narrow conduction channel, (2) the assembly of electric contacts by ultrasound soldering, (3) deposition of an insulating layer, preventing the surface contact with atmospheric oxygen, which contributes for reliable measurements and the possibility of measuring SnO 2 matrix properties without influence of adsorbed oxygen. Lightly Er-doped SnO 2 sample (0.05 at.%), processed by this manner, has allowed the observation of a maximum about 50 K, in the temperaturedependent resistivity curve, which has not been found previously. This result is probably related to the combination of free electron concentration, which grows with temperature, and the grain boundary scattering, which decreases with temperature, and is the dominant mechanism for sol-gel SnO 2 . The processing also assures a remarkable reproducibility in the decay of photo-induced conductivity, yielding reliability to apply a modeling for the determination of important decay parameters, such as capture energy and grain boundary potential barrier.

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“…6 For the fabrication of SnO 2 nanospheres, several synthesis methods have been developed, such as solgel process, 7,8 hydrothermal method, 9,10 precipitation method, 4 and chemical vapor deposition (CVD) method. [11][12][13] Generally, tin oxide powder for sensor application is prepared by the hydrolysis of SnCl 4 Á5H 2 O solution with an aqueous NH 3 solution. The traditional CVD methods have to be carried out at high temperature.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and characterization of SnO₂ nanospheres for hydrogen detection

Liu

Dong

Bian

et al. 2013

Proceedings of the Institution of Mechanical Engineers, Part N:

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This article demonstrates a novel chemical vapor deposition strategy of tin oxide (SnO 2) by vapor phase material reaction at room temperature and presents the applications to hydrogen detection using this material. Tin chloride anhydrate was used as the precursor, and it reacted with NH 3 to form Sn(OH) 4 nanospheres. The samples with Sn(OH) 4 nanospheres were subject to drying up at 80°C, and then they transformed to polycrystalline SnO 2 nanospheres. The X-ray diffraction measurement was carried out to investigate the structural properties of the SnO 2 films annealed at various temperatures. The morphology of the samples was investigated by field-emission scanning electron microscopy. Micropellistor was fabricated based on the SnO 2 catalyst for hydrogen detection. Compared with the traditional method to make SnO 2 sensing material (hydrolysis of SnCl 4 Á5H 2 O in basic solutions), the SnO 2 nanospheres prepared by this method have a higher relative sensitivity and a good linearity for the concentration of H 2 ranging from 0% v/v to 4% v/v. A short response time about 6 s was achieved.

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Preparation of SnO2 thin films at low temperatures with H2 gas by the hot-wire CVD method

Cited by 13 publications

References 4 publications

Uniform Deposition of Titanium Dioxide Films by Chemical Vapor Deposition (CVD)

Uniform Deposition of Titanium Dioxide Films by Chemical Vapor Deposition (CVD)

Improved electrical transport in lightly Er-doped sol–gel spin-coating SnO2 thin films, processed by photolithography

Fabrication and characterization of SnO₂ nanospheres for hydrogen detection

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Preparation of SnO2 thin films at low temperatures with H2 gas by the hot-wire CVD method

Cited by 13 publications

References 4 publications

Uniform Deposition of Titanium Dioxide Films by Chemical Vapor Deposition (CVD)

Uniform Deposition of Titanium Dioxide Films by Chemical Vapor Deposition (CVD)

Improved electrical transport in lightly Er-doped sol–gel spin-coating SnO2 thin films, processed by photolithography

Fabrication and characterization of SnO2 nanospheres for hydrogen detection

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Product

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Fabrication and characterization of SnO₂ nanospheres for hydrogen detection