1996
DOI: 10.1016/s0169-4332(96)00128-6
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Preparation of H-terminated Si surfaces and their characterisation by measuring the surface state density

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Cited by 39 publications
(19 citation statements)
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“…78 are generally consistent with other investigations of Flietner et al [717,718,720,721,723], as well as with the earlier analyses of Allen and Gobeli [710], Yamagishi [572], and Lam [716]. All of these show that well-passivated Si surfaces feature a`U-shaped' distribution of surface states, which is typically symmetric about midgap.…”
Section: Energy Distributionsupporting
confidence: 90%
“…78 are generally consistent with other investigations of Flietner et al [717,718,720,721,723], as well as with the earlier analyses of Allen and Gobeli [710], Yamagishi [572], and Lam [716]. All of these show that well-passivated Si surfaces feature a`U-shaped' distribution of surface states, which is typically symmetric about midgap.…”
Section: Energy Distributionsupporting
confidence: 90%
“…Single crystalline wafer pieces ͑n type, ͓P͔Ϸ10 15 cm Ϫ3 ͒ were chemically cleaned prior to deposition according to the following procedure which is similar to Ref. 13: First, the wafer pieces were precleaned in ethanole and then in a fresh solution ͑1:1͒ of concentrated sulfuric acid and hydrogen peroxide ͑30%͒. Second, the protective 100-nm-thick thermal oxide was stripped by an etch in buffered hydrofluoric acid (pHϭ5.5) and the Si surface reoxidized in a sulfuric acid/hydrogen peroxide solution.…”
Section: A Substrate Preparationmentioning
confidence: 99%
“…For n-type Si(111)-H, an accumulation layer was measured. [44][45][46] Thus, the drift of electrons is expected toward the surface ( Figure 5). For p-type Si(111)-H, an inversion layer was measured.…”
Section: Resultsmentioning
confidence: 99%