2002
DOI: 10.1364/ao.41.003840
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Preparation and characterization of a reference aluminum mirror

Abstract: The preparation and characterization of a reference mirror of protected aluminum (Al) is reported. The mirror is made of 50-60-nm-thick Al film, coated with several-nanometer-thick A12O5 and 30-nm-thick film of AIN. The mirror characterization is based on reliable and precise reflectance measurements relative to a silicon- (Si-) wafer reference mirror. The simple phenomenological Drude-Lorentz model is applied for modeling the dispersion relations n(lambda) and k(lambda) of the Al film. The reflection of the p… Show more

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Cited by 21 publications
(9 citation statements)
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“…A thin aluminum film is used to enhance the reflectance of a silicon mirror up to more than 80%, which enables imaging of low‐light‐level objects. The typical reflectance of a silicon mirror at wavelengths of 500–800 nm is approximately 35% 13…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…A thin aluminum film is used to enhance the reflectance of a silicon mirror up to more than 80%, which enables imaging of low‐light‐level objects. The typical reflectance of a silicon mirror at wavelengths of 500–800 nm is approximately 35% 13…”
Section: Resultsmentioning
confidence: 99%
“…To enhance the reflectance from the mirror surface, we fabricated an optical coating on a silicon wafer, known as silvering, in which metals such as aluminum are deposited on glass substrates to make a mirror. The aluminum coating can yield a reflectivity of around 80–90% over the visible spectrum 13. We describe the characterization of an aluminum‐coated silicon substrate for a mirror‐embedded microchannel, and compare it with a bare, uncoated silicon substrate.…”
Section: Introductionmentioning
confidence: 99%
“…The computer controlled stepper motor of the VASRA accessory ensures reproducible adjustment of the incident angle with an accuracy Δθ = ±0.25º (according to the Cary Operation Manual). A self-made reference Al-mirror, whose preparation and characterization are described in details elsewhere (Babeva et al, 2002), is used as a standard mirror.…”
Section: Optical Methods For Control and Characterization Of Thin Filmentioning
confidence: 99%
“…For wavelengths below the IR spectrum, the atomistic or quantum mechanical treatment of dispersion is needed. For aluminum with its high reflectivity and characteristic absorption band near 800 nm, it requires accounting of both inter-and intraband transitions [2,11,12]. There are two known, large interband transitions near the visible range of the spectrum at ∼ 0.5 eV and ∼ 1.6 eV [13].…”
Section: Reflectivity and Dielectric Function Modelmentioning
confidence: 99%
“…The Lorentz-Drude model has been applied to the optical dispersion of aluminum for over 30 years including work by Smith and Segall, Ashcroft and Sturm, Markovic and Rakic, and Bebeva et al [11][12][13]. While this model is not explicitly derived in terms of inter-and intraband transitions, the atomist form has proven useful in experimentation [2].…”
Section: Reflectivity and Dielectric Function Modelmentioning
confidence: 99%