Power handling and temperature coefficient studies in FBAR duplexers for the 1900 MHz PCS band

Larson, J.D.; Ruby, J.D.; Bradley, R.C.; Wen, Juan; Kok, Shong-Lam; Chien, A.

doi:10.1109/ultsym.2000.922680

Cited by 54 publications

(32 citation statements)

References 7 publications

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“…Both processes of surface micromachining and backside etching require etching the unwanted part, which is a relatively expensive and very complex fabrication process. (4)(5)(6)(7)(8)(9) Moreover, the SMR device is attracting attention because of its simple structure that includes a substrate, Bragg reflector, electrode, and piezoelectric layer manufactured through a process that is compatible with the IC industry. (10)(11)(12) It has the following advantages: it is manufactured through planar processes and possesses a robust structure.…”

Section: Introductionmentioning

confidence: 99%

Simulation of Solidly Mounted Resonator Using Mason Model and Its Implementation

2017

Sensors and Materials

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Acoustic wave devices are divided into two categories: surface acoustic wave (SAW) and bulk acoustic wave (BAW) devices. To provide modification parameters during manufacturing, advanced modeling, simulation, and other computational methods is crucial for maintaining a competitive edge through efficient product design. In this study, an equivalent circuit modification based on the Mason model is used for obtaining the actual device measurements. The effects of various film conditions, material properties, and geometrical variations on resonator performance are investigated. Furthermore, the performance of a filter comprising various stages of series and parallel resonators is examined.

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Section: Introductionmentioning

confidence: 99%

Simulation of Solidly Mounted Resonator Using Mason Model and Its Implementation

2017

Sensors and Materials

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“…rf mechanical resonators are constantly improving in quality factors, integration capabilities and size, allowing more-efficient, lower-cost wireless communications components, such as filters, duplexers, or mixers. [1][2][3][4] This progress in design and fabrication demands an accompanying development of experimental techniques which are suitable for the electromechanical characterization of the emerging prototypes. Several laser interferometer based methods have been proposed.…”

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confidence: 99%

“…The resonator considered here is an Agilent Technologies' film bulk acoustic resonator ͑FBAR͒, which consists of a free-standing piezoelectric AlN pentagonal membrane with side lengths about 100 m and overlapping Mo electrodes. 1,3,4 The membrane is designed to have a main thickness vibration mode with a resonance frequency around 1.9 GHz. Before the SAFM experiments, electrical characterization of the particular device under study showed a resonance peak at 1.898 GHz in the power reflection coefficient.…”

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confidence: 99%

“…This behavior can be explained as follows: when a rf driving signal is applied to the FBAR, part of the energy is absorbed by the membrane and converted into heat. 4 Heat transfer from the membrane to the surroundings sets a thermal equilibrium, and the membrane reaches an equilibrium temperature T eq . As a result, the membrane expands and bows proportionally to T eq .…”

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Scanning acoustic force microscopy characterization of thermal expansion effects on the electromechanical properties of film bulk acoustic resonators

Paulo

Liu

Bokor

2005

Applied Physics Letters

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This letter demonstrates the application of scanning acoustic force microscopy for the characterization of film bulk acoustic resonators beyond detection of the gigahertz vibration amplitude and acoustic wave field imaging. We present a method to measure thermal expansion effects on these resonators by modulating the driving signal amplitude and then varying the modulation frequency from a few hertz to several tens of kilohertz. For the particular device considered here, we show the influence of thermal expansion effects on its electromechanical response and the acoustic wave field images. The thermal relaxation time constant of the resonator is measured and compared with a theoretical estimation based on the heat transfer analysis of the system.

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“…High power density ultrasonic transducers are used in a variety of devices for drilling [1], cleaning [2], welding [3], filters [4], and novel transformers [5]. In general driving piezoelectrics at high power levels introduces nonlinear and thermal effects that need to be understood in order to accurately measure and control the transducer.…”

Section: Introductionmentioning

confidence: 99%

Characterization of transducers and resonators under high drive levels

Sherrit

Bao

Sigel

et al.

2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.01CH37263)

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-In many applications, piezoelectric transducers are driven at AC voltage levels well beyond the level for which the material was nominally characterized.In this paper we describe an experimental setup that allows for the determination of the main transducer or resonator properties under large AC drive. A sinusoidal voltage from a waveform generator is amplified and applied across the transducer/resonator in series with a known high power resistor. The amplitude of applied voltage and the amplitude and the relative phase of the current through the resistor are monitored on a digital scope. The frequency of the applied signal is swept through resonance and the voltage/current signals are recorded.After corrections for the series resistance and parasitic elements the technique allows for the determination of the complex impedance spectra of the sample as a function of frequency. In addition, access to the current signal allows for the direct investigation of non-linear effects through the application of Fourier transform techniques on the current signal. Our results indicate that care is required when interpreting impedance data at high drive level due to the frequency dependence of the dissipated power. Although the transducer/resonator at a single frequency and after many cycles may reach thermal equilibrium, the spectra as a whole cannot be considered an isothermal measurement due to the temperature change with frequency. Methods to correct for this effect will be discussed. Results determined from resonators of both soft and hard PZT and a ultrasonic horn transducer are presented.

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Power handling and temperature coefficient studies in FBAR duplexers for the 1900 MHz PCS band

Cited by 54 publications

References 7 publications

Simulation of Solidly Mounted Resonator Using Mason Model and Its Implementation

Simulation of Solidly Mounted Resonator Using Mason Model and Its Implementation

Scanning acoustic force microscopy characterization of thermal expansion effects on the electromechanical properties of film bulk acoustic resonators

Characterization of transducers and resonators under high drive levels

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