Polycrystalline diamond MEMS resonator technology for sensor applications

Sepúlveda, Nelson; Aslam, D.M.; Sullivan, John P.

doi:10.1016/j.diamond.2005.08.032

Cited by 58 publications

(33 citation statements)

References 6 publications

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“…Its very high thermal conductivity (22 W/(cm·K)), and excellent wear/corrosion resistivity make diamond suitable for sensing, signal processing and communication in harsh environments [4]. As device dimensions scale down for applications that require higher sensitivity or higher speed, thin films of diamond have been grown by techniques such as microwave plasma chemical vapor deposition (MPCVD) [5,6], or hot filament chemical vapor deposition (HFCVD) [7,8], showing material properties comparable to single crystal diamond. Resonant structures based on polycrystalline, nanocrystalline, and ultrananocrystalline diamond films have been explored [8][9][10][11][12][13][14][15][16][17], demonstrating both high frequency (HF) and high quality (Q) factor resonators.…”

Section: Introductionmentioning

confidence: 99%

High frequency torsional-mode nanomechanical resonators enabled by very thin nanocrystalline diamond diaphragms

Yang

Zorman

Feng

2015

Diamond and Related Materials

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Section: Introductionmentioning

confidence: 99%

High frequency torsional-mode nanomechanical resonators enabled by very thin nanocrystalline diamond diaphragms

Yang

Zorman

Feng

2015

Diamond and Related Materials

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“…8 Above this doping level, the B-doped diamond films exhibit low resistivity values, in the range of 5 × 10 −3 Ω cm. 9 This allows for a wide range of different applications such as in microelectromechanical systems (MEMS) for high-frequency resonators 10,11 and electrical probes for atomic force microscopy (AFM), in particular applied in scanning spreading resistance microscopy (SSRM) 12,13 and scanning electrochemical microscopy.…”

Section: Introductionmentioning

confidence: 99%

Effect of Boron Doping on the Wear Behavior of the Growth and Nucleation Surfaces of Micro- and Nanocrystalline Diamond Films

Buijnsters

Tsigkourakos

Hantschel

et al. 2016

ACS Appl. Mater. Interfaces

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Effect of boron doping on the wear behavior of the growth and nucleation surfaces of micro-and nanocrystalline diamond films Buijnsters CopyrightOther than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons. Takedown policyPlease contact us and provide details if you believe this document breaches copyrights. We will remove access to the work immediately and investigate your claim. ABSTRACT: B-doped diamond has become the ultimate material for applications in the field of microelectromechanical systems (MEMS), which require both highly wear resistant and electrically conductive diamond films and microstructures. Despite the extensive research of the tribological properties of undoped diamond, to date there is very limited knowledge of the wear properties of highly B-doped diamond. Therefore, in this work a comprehensive investigation of the wear behavior of highly B-doped diamond is presented. Reciprocating sliding tests are performed on micro-and nanocrystalline diamond (MCD, NCD) films with varying B-doping levels and thicknesses. We demonstrate a linear dependency of the wear rate of the different diamond films with the B-doping level. Specifically, the wear rate increases by a factor of 3 between NCD films with 0.6 and 2.8 at. % B-doping levels. This increase in the wear rate can be linked to a 50% decrease in both hardness and elastic modulus of the highly B-doped NCD films, as determined by nanoindentation measurements. Moreover, we show that fine-grained diamond films are more prone to wear. Particularly, NCD films with a 3× smaller grain size but similar B-doping levels exhibit a double wear rate, indicating the crucial role of the grain size on the diamond film wear behavior. On the other hand, MCD films are the most wear-resistant films due to their larger grains and lower B-doping levels. We propose a graphical scheme of the wear behavior which involves planarization and mechanochemically driven amorphization of the surface to describe the wear mechanism of B-doped diamond films. Finally, the wear behavior of the nucleation surface of NCD films is investigated for the first time. In particular, the nucleation surface is shown to be susceptible to higher wear compared to the growth surface due to its higher grain boundary line density.

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“…Micro-machines or micro-electromechanical systems (MEMS), such as sensors (e.g., accelerometers, gyroscopes), actuators (optical and RF switches, micro-grippers), electronic devices (e.g., RF oscillators and lters) or integrated micro uidic systems 1,2) , involve complex design, manufacturing, and packaging processes. It is therefore very important to maximize the reliability of micro-machines or MEMS devices.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Nano-Crystalline Diamond Duplex Micro-Gear by Hot Filament Chemical Vapor Deposition

Wang

Zuo

et al. 2017

Mater. Trans.

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Chemical vapor deposition (CVD) diamond micro-components are attracting considerable interest due to their exceptional properties and potential applications. Micro-gears are an important actuating component in micro-machines or micro-electromechanical systems. In this study, nano-crystalline diamond duplex micro-gears for micro-machine applications have been fabricated by combining hot lament CVD (HFCVD) with inductively coupled plasma etching. Based on scanning electron microscopy, X-ray diffraction, and micro-Raman spectroscopy observations, the nano-crystalline diamond duplex micro-gears produced by HFCVD are found to be faithful replicas of microstructure silicon molds produced by time-multiplexed deep etching. The fabricated duplex micro-gear consists of two gears. A gear with 14 teeth constitutes the top layer and has root and tip diameters of 1.14 mm and 1.52 mm, respectively, while the second 20-tooth gear constitutes the bottom layer and has root and tip diameters of 1.75 mm and 2.20 mm, respectively. The total thickness of the micro-gear is about 20 μm.

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Polycrystalline diamond MEMS resonator technology for sensor applications

Cited by 58 publications

References 6 publications

High frequency torsional-mode nanomechanical resonators enabled by very thin nanocrystalline diamond diaphragms

High frequency torsional-mode nanomechanical resonators enabled by very thin nanocrystalline diamond diaphragms

Effect of Boron Doping on the Wear Behavior of the Growth and Nucleation Surfaces of Micro- and Nanocrystalline Diamond Films

Fabrication of Nano-Crystalline Diamond Duplex Micro-Gear by Hot Filament Chemical Vapor Deposition

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