The transition to solid-state Li-ion batteries will enable progress toward energy densities of 1000 W·hour/liter and beyond. Composites of a mesoporous oxide matrix filled with nonvolatile ionic liquid electrolyte fillers have been explored as a solid electrolyte option. However, the simple confinement of electrolyte solutions inside nanometersized pores leads to lower ion conductivity as viscosity increases. Here, we demonstrate that the Li-ion conductivity of nanocomposites consisting of a mesoporous silica monolith with an ionic liquid electrolyte filler can be several times higher than that of the pure ionic liquid electrolyte through the introduction of an interfacial ice layer. Strong adsorption and ordering of the ionic liquid molecules render them immobile and solid-like as for the interfacial ice layer itself. The dipole over the adsorbate mesophase layer results in solvation of the Li + ions for enhanced conduction. The demonstrated principle of ion conduction enhancement can be applied to different ion systems. Mees, P. M. Vereecken, Silica gel solid nanocomposite electrolytes with interfacial conductivity promotion exceeding the bulk Li-ion conductivity of the ionic liquid electrolyte filler. Sci. Adv. 6, eaav3400 (2020).
An overview of the existing two-dimensional carrier profiling tools using scanning probe microscopy includes several scanning tunneling microscopy modes, scanning capacitance microscopy, Kelvin probe microscopy, scanning spreading resistance microscopy, and dopant selective etching. The techniques are discussed and compared in terms of the sensitivity or concentration range which can be covered, the quantification possibility, and the final resolution, which is influenced by the intrinsic imaging resolution as well as by the response of the investigated property to concentration gradients and the sampling volume. From this comparison it is clear that, at present, none of the techniques fulfills all the requirements formulated by the 1997 Semiconductor Industry Association roadmap for semiconductors [National Technology Roadmap for Semiconductors (Semiconductor Industry Association, San Jose, CA, 1997)]. Most methods are limited to pn-junction delineation or provide a semiquantitative image of the differently doped regions. However, recent comparisons have shown that the techniques can provide useful information, which is not accessible with any other method.
Over the past decade, boron‐doped diamond tips have become the ultimate choice for electrically characterizing microelectronics devices using scanning probe methods such as scanning spreading resistance microscopy (SSRM). Although nanometer‐scale electrical resolution has been demonstrated, the development of a reliable probe process remained a challenge. Therefore, we did develop in this work solid diamond tips with sub‐nanometer electrical resolution and integrated them into metal cantilevers using a peel‐off approach. It is shown that the ultra‐high tip resolution is achieved by diamond nanocrystals protruding from the apex of the diamond pyramid. The yield for sub‐nanometer probes is 20–30% in air and 40–60% in vacuum. This paper describes the fabrication scheme, discusses probe characterization, and shows SSRM measurements obtained with these probes. Our probes are routinely used for SSRM measurements and current efforts are focusing on increasing the yield for sub‐nanometer tips further.
The availability of very sharp, wear-proof, electrically conductive probes is one crucial issue for conductive atomic force microscopy (AFM) techniques such as scanning capacitance microscopy, scanning spreading resistance microscopy, and nanopotentiometry. The purpose of this systematic study is to give an overview of the existing probes and to evaluate their performance for the electrical techniques with emphasis on applications on Si at high contact forces. The suitability of the characterized probes has been demonstrated by applying conductive AFM techniques to test structures and state-of-the-art semiconductor devices. Two classes of probes were examined geometrically and electrically: Si sensors with a conductive coating and integrated pyramidal tips made of metal or diamond. Structural information about the conductive materials was obtained by electron microscopy and other analytical tools. Swift and nondestructive procedures to characterize the geometrical and electrical properties of the probes prior to the actual AFM experiment have been developed. Existing contact models have been used to explain variations in the electrical performance of the conductive probes.
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