Effect of Boron Doping on the Wear Behavior of the Growth and Nucleation Surfaces of Micro- and Nanocrystalline Diamond Films

Buijnsters, Josephus Gerardus; Tsigkourakos, Menelaos; Hantschel, Thomas; Gomes, Francis Oliver Vinay; Nuytten, Thomas; Favia, P.; Bender, Hugo; Arstila, Kai; Célis, Jean-Pierre; Vandervorst, Wilfried

doi:10.1021/acsami.6b08083

Cited by 40 publications

(13 citation statements)

References 71 publications

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“…Added to the fact that none of the disks on the entire Si substrate collapsed or delaminated at any stage during or after RIE, our results show good adhesion between the NCD film and the substrate, thanks to the adequate growth conditions and seeding quality. The latter, in particular, is comparable to that of previously reported NCD films which successfully withstood reciprocating sliding tests against ceramic ball counter‐bodies with Hertzian contact pressures up to 1.4 GPa, without delamination or spallation …”

Section: Resultssupporting

confidence: 85%

“…The choice of water over ethanol was necessary due to its higher viscosity, in order not to leak through the printer nozzles. Nonetheless, from Figure b, we estimated a high seeding density of the order of ≈10 10 cm −2 , which is a desirable order of magnitude to enable the growth of fully closed thin‐films of only 100–200 nm thickness, with good adhesion to the substrate and low surface roughness …”

Section: Resultsmentioning

confidence: 97%

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Inkjet‐Printed High‐Q Nanocrystalline Diamond Resonators

Sartori

Belardinelli

Dolleman

et al. 2018

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switches for wireless communication systems, as it promises high operating frequency in the GHz range, as well as narrow bandwidth (high Q-factor) and low phase noise. [1][2][3] This is thanks to diamond's excellent material properties, such as high Young's modulus (up to ≈10 6 N mm −2 ), high acoustic velocity (≈1.8 × 10 4 m s −1 ), [3] low thermoelastic damping, high thermal conductivity (>2000 W m −1 K −1 ), and low thermal expansion coefficient (≈10 −6 K −1 at 300 K). [4] The feasibility of using NCD for high-performance MEMS resonators has already been demonstrated in a range of devices, including cantilever beams, [5,6] tuning forks, [7] rings, [8] disks, [9][10][11] and spheres. [12] In particular, NCD MEMS structures that resonate with whispering gallery modes (WGM), such as disks and spheres, have shown much lower anchor losses and higher (f 0 × Q) figure of merit. [3,11] However, despite the recent progress, adding diamond structures into integrated circuits for a complete functional device remains a challenge. The current limitations relate to the difficulty in combining NCD with other microfabricated structures, mostly due to nanodiamond seeding requirements, but also due to the harsh environment during chemical vapor deposition (CVD) of the NCD film, as well as mechanical issues caused by intrinsic stress in the film. [13] Nanodiamond seeding in particular suffers from the process not being selective, i.e., instead of diamond being deposited and grown only where it is required on the device, most established methods consist of dispersing nanodiamond over a large substrate by, e.g., dip-coating, dropcasting, or spin-seeding, prior to film growth by CVD. [14] The grown NCD film needs then to be patterned by traditional photo-/e-beam lithography and lift-off techniques, which add substantial complexity and cost of fabrication. As a solution to circumvent low seeding density and plasma uniformity issues during growth of the NCD layer, Lebedev et al. proposed waferto-wafer bonding of pregrown NCD films onto another wafer to fabricate NCD disk resonators with high Q-factors (i.e., Q > 10 3 ). [9] This technique however did not remove the need to pattern the diamond after it was bonded onto the wafer. Possas et al. demonstrated the fabrication of NCD cantilever beams by patterning the nanodiamond seeding layer by means of sacrificial metal layer and etching, [15] but still top-down patterning by lithography was required. Akgul et al. reported Q-factors of the order of 7 × 10 4 for on-chip NCD disk resonators which required up to five masking/etching steps. [11] Yang et al., on the Diamond is a highly desirable material for state-of-the-art micro-electromechanical (MEMS) devices, radio-frequency filters and mass sensors, due to its extreme properties and robustness. However, the fabrication/integra tion of diamond structures into Si-based components remain costly and complex. In this work, a lithography-free, low-cost method is introduced to fabricate diamond-based micro-resonators: a modified home/office d...

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Section: Resultssupporting

confidence: 85%

Section: Resultsmentioning

confidence: 97%

Inkjet‐Printed High‐Q Nanocrystalline Diamond Resonators

Sartori

Belardinelli

Dolleman

et al. 2018

Small

Self Cite

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“…It is generally assumed that the apices of the diamond-tipped probes used in AFM tomography and lithography do not change significantly during etching because diamond is extremely hard. However, boron doping has been shown to reduce the hardness and increase the wear rate of diamond (Buijnsters et al, 2016). This effect is more pronounced at heavier doping levels, such as would be required to produce highly conductive diamond AFM probes.…”

Section: Introductionmentioning

confidence: 99%

Improving the Consistency of Nanoscale Etching for Atomic Force Microscopy Tomography Applications

Buckwell

Hudziak

et al. 2019

Front. Mater.

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The atomic force microscope (AFM) empowers research into nanoscale structural and functional material properties. Recently, the scope of application has broadened with the arrival of conductance tomography, a technique for mapping current in three-dimensions in electronic devices by gradually removing sample material with the scanning probe. This technique has been valuable in studying resistance switching memories and solar cells, although its broader use has been hindered by a lack of understanding of its reliability and practicality. Implementation can be preclusive, owing to difficulties in characterizing tip-sample interactions and accounting for probe degradation, both of which are crucial factors in process efficacy. This work follows the existing conductance tomography literature, presenting an insight into the repeatability and reliability of the material removal processes. The consistency of processes on a hard oxide and a softer metal are investigated, to understand the critical differences in etching behavior that might affect tomography measurements on heterostructures. Individual probe behavior stabilizes following a wearing-in stage and etching processes are consistent between probes, in particular on oxide. However, process inconsistency increases with applied force on metal. The effects of scan angle, tip speed and feedback gain are therefore explored and their tuning found to improve the spatial consistency of material removal. With these findings, we aim to present a critical study of the implementation of tomography with the AFM in order to contribute to its methodological development.

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“…Diamond is a kind of carbon material which has lots of outstanding chemical and physical properties, such as excellent corrosion resistance, extremely high thermal conductivity, biocompatibility, etc [1][2][3]. Stainless steel is a kind of important metal materials, which is widely used in food industry, medical apparatus and so on.…”

Section: Introductionmentioning

confidence: 99%

“…When the power is low, the filament temperature is low, the concentration of dissociated atomic hydrogen is low[22]. And the atomic hydrogen etches sp 2 carbon faster than sp3 carbon. So, low concentration of atomic hydrogen leads to low content of the diamond.…”

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confidence: 99%

Low-stress diamond films deposited on stainless steel by a two-step dropped power process in chemical vapor deposition

Xiao

Feng

et al. 2018

Diamond and Related Materials

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A continuous low-stress diamond film has been prepared on stainless steel by a novel two-step dropped power process using a Cr/CrN/CrTiAlN film as an interlayer. After the interlayer was deposited on the stainless steel, isolated diamond particles were firstly prepared under high power of 1800 W for 10 min in CVD, which has low stress, releasing most of thermal stress. Then, the low power of 1500 W was adopted to form continuous diamond films. The stress is obviously lower than that of the continuous diamond film deposited only in the first CVD process, indicating that the two-step dropped power process surely decreases the internal stress of the film. The blocky microstructure on sandblasted stainless steel and the existence of very small amount of pores in the diamond film are also beneficial to releases the stress.

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Effect of Boron Doping on the Wear Behavior of the Growth and Nucleation Surfaces of Micro- and Nanocrystalline Diamond Films

Cited by 40 publications

References 71 publications

Inkjet‐Printed High‐Q Nanocrystalline Diamond Resonators

Inkjet‐Printed High‐Q Nanocrystalline Diamond Resonators

Improving the Consistency of Nanoscale Etching for Atomic Force Microscopy Tomography Applications

Low-stress diamond films deposited on stainless steel by a two-step dropped power process in chemical vapor deposition

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