2009
DOI: 10.1117/12.813399
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Polarization aberration control for ArF projection lenses

Abstract: High NA imaging or/and polarization illumination imaging for exposure tool requires not only scalar aberration performance but also vectorial aberration (so called polarization aberration) control. There are several methods to explain vectorial aberrations such as, Jones Matrix Pupil, Pauli spin matrix, etc. Pauli spin matrix may be intuitively easier to understand and suitable to show scalar wavefront. However, direct use of Pauli spin matrix method may not express physical meaning of vectorial aberration exa… Show more

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Cited by 4 publications
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“…In the past, different kinds of compensating PA methods have been proposed [18][19][20][21] . Tadashi Arai et.al.…”
Section: Introductionmentioning
confidence: 99%
“…In the past, different kinds of compensating PA methods have been proposed [18][19][20][21] . Tadashi Arai et.al.…”
Section: Introductionmentioning
confidence: 99%