2017
DOI: 10.3788/co.20171004.0391
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Point diffraction in terference detection technology

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Cited by 4 publications
(2 citation statements)
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“…The point diffraction interferometer is well developed [20][21][22]. A near-ideal spherical wave produced by pinhole diffraction is employed as the reference wave surface [23][24][25][26]. That is a plane wave focused by an objective lens and then across a circular aperture [27][28][29].…”
Section: Introductionmentioning
confidence: 99%
“…The point diffraction interferometer is well developed [20][21][22]. A near-ideal spherical wave produced by pinhole diffraction is employed as the reference wave surface [23][24][25][26]. That is a plane wave focused by an objective lens and then across a circular aperture [27][28][29].…”
Section: Introductionmentioning
confidence: 99%
“…Reference wavefront used in traditional interferometers [1] such as Twyman-Green interferometer and Fizeau interferometer is generated by reflection of a standard reference mirror, so accuracy of the reference wavefront is limited by fabrication accuracy of the standard reference mirror which is usually not better than λ/40 (λ = 532 nm). Different from above interferometers, reference wavefront used in the point diffraction interferometer (PDI) [2][3][4][5][6][7] is generated by a diffraction element called reference wavefront source (RWS). RWS generates a nearly ideal spherical reference wavefront by diffraction at a small aperture of micrometer diameter, so accuracy of the reference wavefront is not limited by a standard reference mirror and can reach sub-nanometer scale.…”
Section: Introductionmentioning
confidence: 99%