Improved phase-shifting method for pinhole point diffraction interferometer based on a precise driving of the substrate

Lu, Jiasheng; Li, Bing; Zhao, Zhuo; Geng, Leqi

doi:10.1364/ol.465189

Cited by 4 publications

(3 citation statements)

References 15 publications

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“…Obviously, the object beam and the reference beam travel almost the same path in the proposed PDI, which would lead to high stability and strong noise resistance. Compared with those phase-shifting PDIs [20][21][22][23], the proposed PDI is appropriate for real-time assessment of dynamic objects without sacrificing FOV of camera.…”

Section: Methodsmentioning

confidence: 99%

“…However, this PDI captures phase shifted interferograms sequentially by linearly moving one of the two gratings, which makes it difficult in optical setup and unsuitable for real-time measurement of dynamic objects. Lu [21] proposed an improved phase-shifting PDI, which achieves sequential acquisition of two phase-shifted interferograms by moving the pinhole substrate. However, this PDI has difficulty optical implementation and low measurement efficiency.…”

Section: Introductionmentioning

confidence: 99%

“…The intensity ratio between the reflected beam and the transmitted beam can be adjusted by changing PBS with different Reflection/ Transmission Ratio (RTR), so the interference fringe contrast can be improved for better interferogram quality. Therefore, compared with current PDI [20][21][22][23][24][25][26][27][28][29][30][31][32], this proposed PDI has flexible optical alignment, high stability and strong noise resistance. Moreover, the carrier frequency and legibility of the interferogram can be modulated easily by adjusting the inclined angle.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Single shot point-diffraction interferometer by a plate beamsplitter

Shan,

Yin,

Zhong

et al. 2024

Phys. Scr.

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A single shot point-diffraction interferometer is proposed in this paper, in which one plate beamsplitter is assembled with one mirror and one pinhole array to duplicate an object beam and generate one object beam and one reference beam. One mirror is placed perpendicularly at the rear of the optical 4f system, while one thin plate beamsplitter is placed ahead of the mirror with an inclined angle. With the help of the half-transmission and half-reflection of the plate beamsplitter, one object beam is duplicated into to copies. Owning to the different angles of the plate beamsplitter and the mirror with respect to the optical axis, after Fourier transformed by the second Lens of the 4f system and reflected by the cube beamsplitter, the two copies are separated in the spectral domain. Then, one object beam and one reference beam are generated by the pinhole array placed at the spectral plane. The object and reference beams are Fourier transformed by the third Lens and interferes to generate an off-axis interferogram at the camera. By adjusting the inclined angle of the plate beamsplitter, the carrier frequency of the interferogram can be modulated easily. Therefore, this interferometer has a simple optical setup, easy optical implementation and outstanding measurement ability with high precision, measurement efficiency and stability. Several experimental results will be provided to demonstrate the effectiveness of the proposed system.

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Single shot point-diffraction interferometer by a plate beamsplitter

Shan,

Yin,

Zhong

et al. 2024

Phys. Scr.

View full text Add to dashboard Cite

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Multi-wavelength pinhole point diffraction interferometry for optics metrology with interferometric intensity based phase retrieval method

Geng,

Li,

Zhao

et al. 2024

Optics and Lasers in Engineering

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Tested mirror precision alignment system using a pinhole point diffraction interferometer based on machine vision

Lu,

Li,

Zhao

et al. 2024

J. Opt. Soc. Am. A

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In the pinhole point diffraction interferometer (PPDI), proper alignment between the reflection spot of the tested component and the pinhole is critical to obtain accurate interferograms. At present, adjusting for tilt error requires manual manipulation, and defocus error cannot be corrected. These limitations impede the instrumentation process of PPDI. To address this issue, the proposed tested mirror alignment system utilizes diffraction theory to analyze the mathematical error caused by the misalignment of the tested mirror’s reflected beam and pinhole. An alignment system based on machine vision was designed according to specific requirements. This system incorporates a CCD camera with a zoom lens, the classic PPDI with a pinhole substrate containing a lithography-made mark, and a 3-DOF stepper motor adjusting frame to mount the tested mirror. Additionally, image processing algorithms and step motor driving programs were applied to achieve precise alignment. The system implementation and experimental results indicated that the tilt errors are well-controlled, achieving the defocus error modification, making the interferogram acquisition process more convenient. From the results, this system offers desirable precision and efficiency for PPDI’s tested mirror alignment.

show abstract

Improved phase-shifting method for pinhole point diffraction interferometer based on a precise driving of the substrate

Cited by 4 publications

References 15 publications

Single shot point-diffraction interferometer by a plate beamsplitter

Single shot point-diffraction interferometer by a plate beamsplitter

Multi-wavelength pinhole point diffraction interferometry for optics metrology with interferometric intensity based phase retrieval method

Tested mirror precision alignment system using a pinhole point diffraction interferometer based on machine vision

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