2010
DOI: 10.1088/0960-1317/20/4/043001
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Pneumatic and hydraulic microactuators: a review

Abstract: The development of MEMS actuators is rapidly evolving and continuously new progress in terms of efficiency, power and force output is reported. Pneumatic and hydraulic are an interesting class of microactuators that are easily overlooked. Despite the 20 years of research, and hundreds of publications on this topic, these actuators are only popular in microfluidic systems. In other MEMS applications, pneumatic and hydraulic actuators are rare in comparison with electrostatic, thermal or piezo-electric actuators… Show more

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Cited by 250 publications
(166 citation statements)
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“…But still most naturally compliant robots are actuated fluidically [46]. Therefore flexible materials are pressurized pneumatically [52,[62][63][64] or hydraulically [65] to generate a shape deformation in order to operate the robotic joints.…”
Section: Bio-inspired Robots With Soft Capabilitiesmentioning
confidence: 99%
See 1 more Smart Citation
“…But still most naturally compliant robots are actuated fluidically [46]. Therefore flexible materials are pressurized pneumatically [52,[62][63][64] or hydraulically [65] to generate a shape deformation in order to operate the robotic joints.…”
Section: Bio-inspired Robots With Soft Capabilitiesmentioning
confidence: 99%
“…Thus, this review focuses on the sub-field of fluidically actuated robotic devices, see Today, fluidic, biomimetic, and compliant robotic actuators can be found in various areas of application: From micro-actuation systems for surgical tools and new industrial purposes [65] to medical and rehabilitation devices [2,3,69], or handling devices [66] and mobile robots [47,70].…”
Section: Flexible Fluidic Actuatorsmentioning
confidence: 99%
“…Hydraulic McKibben muscles have been introduced recently as a new generation of these muscles, which operate with pressurized water or oil [18,19]. As noted by Tiwari et al [20] and Meller et al [21], the use of bulky compressors can be avoided in hydraulic artificial muscles (HAMs), thus making compact design possible.…”
Section: Joseph L Mckibben Was the First To Introduce Mckibben Artifmentioning
confidence: 99%
“…This problem is well recognized in the microelectromechanical community [3,4]. Existing microengines (actuators) use mostly two types of forces [3][4][5][6]: electrostatic forces and forces generated by thermal expansion. The electrostatic actuators are fast, but weak.…”
Section: Introductionmentioning
confidence: 99%