1992
DOI: 10.1016/0168-583x(92)95039-t
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Plastic deformation in SiO2 induced by heavy-ion irradiation

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Cited by 87 publications
(73 citation statements)
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“…We propose that ion irradiation generates biaxial compressive stress in silicon nitride, as it is known to do in other amorphous materials at higher ion energies. 2,3,[9][10][11][12][13][14][15][16][17][18] An analysis of the resulting mechanics provides good agreement with experimentally measured deflection profiles, as well as an explanation for the qualitatively different shapes observed in low-stress and high-stress silicon nitrides.…”
Section: Introductionmentioning
confidence: 58%
See 1 more Smart Citation
“…We propose that ion irradiation generates biaxial compressive stress in silicon nitride, as it is known to do in other amorphous materials at higher ion energies. 2,3,[9][10][11][12][13][14][15][16][17][18] An analysis of the resulting mechanics provides good agreement with experimentally measured deflection profiles, as well as an explanation for the qualitatively different shapes observed in low-stress and high-stress silicon nitrides.…”
Section: Introductionmentioning
confidence: 58%
“…From extrapolating data taken at high energy, it appeared that anisotropic deformation does not occur below about 1 MeV. 17,18 Recently, however, colloidal SiO 2 par-FIG. 1.…”
Section: A Simple Mechanical Model For the Membrane Deflectionmentioning
confidence: 99%
“…A stress-driven deformation of the SiO 2 matrix due to SHII-induced in-plane strain perpendicular to the ion beam direction has also been suggested as a potential elongation mechanism [107]. The latter leads to the well known "ion hammering" effect [108,109] causing the anisotropic expansion of both bulk SiO 2 [95,110] and colloidal SiO 2 [111,112] perpendicular to the incident beam. The lack of NP elongation in the absence of a sufficiently thick surrounding matrix, as shown by Penninkhof et al [113], supports this theory.…”
Section: Introductionmentioning
confidence: 99%
“…The anisotropic deformation is most pronounced at low temperatures ͑Ͻ100 K͒ and decreases with increasing irradiation temperature. 4,7 The deformation increases with ion fluence at a constant rate, without saturation. It is well established that the deformation is mainly driven by electronic excitations rather than the atomic displacements induced by the ion beam.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4][5][6][7] The anisotropy is related to the direction of the ion beam: materials expand perpendicular to the ion beam and contract parallel to the ion beam while maintaining their volume. The anisotropic deformation is most pronounced at low temperatures ͑Ͻ100 K͒ and decreases with increasing irradiation temperature.…”
Section: Introductionmentioning
confidence: 99%